研究者業績

原田 泰典

ハラダ ヤスノリ  (Yasunori Harada)

基本情報

所属
兵庫県立大学 大学院 工学研究科 機械系工学専攻 教授
学位
工学博士(1990年11月 広島大学)

J-GLOBAL ID
200901085355792475
researchmap会員ID
1000050633

論文

 331

MISC

 144

書籍等出版物

 14

講演・口頭発表等

 729
  • 原田 泰典, 佐伯 優斗, 芝崎 和馬, 服部 兼久, 渡邊 吉弘
    年次大会 2016年
    <p>The effects of projection conditions on the surface hardness and fatigue strength of stainless steel was investigated. In the peening process, the equipment were used an air-type machine and ultrasonic peening machine. The microshot media used were high-carbon cast with an average diameter of 0.1mm. The surface hardness data showed that, in the case of microshot peening, work hardening extended deeper than the mean diameter of the media. In addition, in the case of ultrasonic peening, the surface hardness increased slowly with the projection time. The rotary bending fatigue tests were carried at a frequency of 3150 cycles/min. Improvement of the fatigue strength was observed by both treatments. The higher effect was found in the ultrasonic peening treatment, because a work-hardened layer was formed deeper in the material.</p>
  • 原田 泰典, 上山 穣, 服部 修治, 小川 隆樹, 麻 寧緒
    年次大会 2016年
    <p>In press forming, pure titanium sheet has sufficient ductility. However, the seizure tends to occur during the deep drawing due to high reactivity with die materials. The authors reported that the heat oxided sheets were treated by oxide coating so as to get oxide surface layer effective for preventing the seizing. In the current study, the square titanium cups were formed by multistage deep drawing using oxided titanium sheets for preventing seizing. The sheets were employed and a flat sheet blank is formed into a square by a punch. Various cups were drawn by exchanging the punch and die. The die was a funnel shape without a blankholder in the subsequent stages. The effects of the oxide layer and die shape on the occurrence of seizure in multistage deep drawing were examined. The square cups were successfully drawn by oxide coating. As the number of drawn cups increases, the thickness strain increases at the corner of cups. However, the seizure did not cause even for cups of the 12th stage. It was found that the oxide titanium sheets have sufficient ability in preventing the seizure in multistage deep drawing processes.</p>
  • 原田 泰典, 服部 修治, 野瀬田 翔伍
    年次大会 2016年
    <p>In press forming, pure titanium sheet has sufficient ductility. However, the seizure tends to occur during the deep drawing due to high reactivity with die materials. In the current study, by using the resin composite die, the titanium cups were formed by deep drawing for preventing seizing. In the experiment, the material was pure titanium sheet TP340. The initial thickness of the sheet was 0.5 mm in thickness. The sheets were employed and a flat sheet blank is formed into a cylindrical by a punch. The effect of the die shape on the deep drawability was examined. The cups were successfully drawn by the resin composite die. Even if the number of drawn cups increased, the thickness strain hardly changed. The seizure did not cause in the case of 100 times of processing number of times. It was found that the resin composite die has sufficient ability in preventing the seizure in deep drawing processes.</p>
  • 服部 修治, 上山 穣, 原田 泰典
    関西支部講演会講演論文集 2016年
  • 佐伯 優斗, 原田 泰典, 服部 兼久, 渡邊 吉弘
    関西支部講演会講演論文集 2016年
  • 原田 泰典
    関西支部講演会講演論文集 2016年
    The applicability of a planetary bearing ball die was carried out to form the corrugated cup by a deep drawing process. The sheet SPCC was employed and a flat sheet blank was formed into a circular by punch. In the die, 16 balls of 10 mm in diameter are arranged with equal intervals between each other on a circumference of the die shoulder region. The initial diameter of the blank are from 70 mm to 100 mm, the thickness was 0.5 mm. It was found that the corrugated cup was successfully drawn by using planetary bearing ball die.
  • 原田 泰典
    生産加工・工作機械部門講演会 : 生産と加工に関する学術講演会 2016年
    <p>The formability of the corrugated cup was investigated by the deep drawing process. The die having rotating shoulder was used to enhance the functionality of the drawn cup. The blank is formed into a cylindrical cup by means of a punch that presses the blank into the die cavity. To form the corrugated surface, the bearing balls were set on the shoulder of a die. The balls rotate freely during forming. The deep drawing process was performed using an oil hydraulic press at a forming speed of about 10 mm/min. The blanks were commercially extra-low carbon steel SPCC, stainless steel SUS304, pure cooper C1100, and pure titanium TP340. The initial diameter and thickness of the blank are 70 to 100 mm and 0.5 mm. The lubricant used was the solid powders of molybdenum disulfide. The metal sheets were successfully drawn without the cracks. It was found that the corrugated cups were successfully formed by using the roller die.</p>
  • 原田 泰典, 服部 修治, 野瀬田 翔伍
    生産加工・工作機械部門講演会 : 生産と加工に関する学術講演会 2016年
    <p>Pure titanium sheet are commonly used in manufacturing today. In press forming, however, the seizure tends to occur during the deep drawing due to high reactivity with die materials. In the current study, by using the resin composite die, the titanium cups were formed by deep drawing for preventing seizing. In the experiment, the material was pure titanium sheet TP340. The initial thickness of the sheet was 0.5 mm in thickness. The sheets were employed and a flat sheet blank is formed into a cylindrical by a punch. The effect of the die shape on the deep drawability was examined. The cups were successfully drawn by the resin composite die. Even if the number of drawn cups increased, the thickness strain hardly changed. The seizure did not cause in the case of 100 times of processing number of times. It was found that the resin composite die has sufficient ability in preventing the seizure in deep drawing processes.</p>
  • 服部 修治, 原田 泰典
    生産加工・工作機械部門講演会 : 生産と加工に関する学術講演会 2016年
    <p>Aiming to enhance corrosion resistance of steel cup, the formability of pure titanium clad sheet by multistage deep drawing was investigated. The blank was constituted by interposing steel between two sheets of pure titanium sheets. In the experiment, the materials were pure titanium sheets TP270, ultralow-carbon steel SPCC, and stainless steel SUS316L. A total plate thickness of the blank was 1.0 mm. In the deep drawing process, the blank was employed and a flat sheet blank was formed into a circle by a punch. For the prevention, pure titanium blank was treated by oxide coating. By this method, titanium blank is not in direct contact with the die during the forming due to the existence of the oxide layer. By oxide coating, the titanium sheet has sufficient ability in preventing the seizure in multistage deep drawing. It was found that the titanium clad cups were successfully drawn.</p>
  • 中谷 正憲, 清水 翔太, 原田 泰典, 内田 仁
    日本機械学会論文集 2015年
    The effect of functionally graded TiN coating on the wear and fretting fatigue behavior of titanium alloy was investigated. The two kinds of monolayer TiN coatings and three kinds of functionally graded TiN coatings were deposited on Ti-6Al-4V alloy substrate using an ion beam assisted deposition technique. Monolayer TiN coating was fabricated by an electron beam evaporation of titanium and simultaneous nitrogen ion bombardment at the acceleration voltage of 0.2 or 2.0 keV. The later consisted of top TiN layer and functionally graded layer. During the fabrication of functionally graded layer, the mixing ratio of nitrogen and argon gas that were used for the generation of ion beam increased stepwisely. The mixed layer formed by ion beam bombardment became thicker by an increase in acceleration voltage. The adhesion and wear resistance improved with an increase in the acceleration voltage. Moreover, inserting the functionally graded layer with the layer thickness of 250 nm improved them significantly. However, further increase in graded layer thickness deteriorated the adhesion and wear resistance. The fretting fatigue life was evaluated by a four-point bending fatigues test. The fretting fatigue life of specimen coated with monolayer TiN film was longer than that of uncoated specimen. The TiN coating with functionally graded layer was the most effective to improve the fretting fatigue life. It was concluded that the insert of functionally graded layer with appropriate layer thickness is effective way for improvement of wear and fretting fatigue behavior.
  • 原田 泰典, 田中 秀星
    年次大会 2015年
    In shot peening, the surface of the material receives a so-called peening effect where strong local deformation forms a work-hardened layer or causes compressive residual stress. More recently, a new type of microshot has been developed to enhance the peening effect. In the present study, the effect of microshot peening on the surface characteristics and fatigue strength of spring steel was investigated. The workpiece was commercial spring steel SUP9. In the microshot peening process, the equipment was used an air-type machine. The microshots used were high-carbon cast steel and cemented carbide with an average diameter of 0.1mm. Air pressure was 0.6 MPa and peening time was in the range of 10-100s. Surface roughness and Vickers hardness for the peened workpiece were measured. The out-of-plane bending fatigue tests were also carried at a frequency of 200 rpm. As the peening time increased, surface roughness for the peened workpiece decreased. The use of microshot was the very effective means of reducing surface defect. The microshot peening process was very efficient in improving the fatigue life of spring steel, especially at a high number of cycles. It was found that the use of the hard microshot was found to cause a significantly enhanced peening effect for spring steel.
  • 原田 泰典, 服部 修治, 上山 穣
    年次大会 2015年
    Aiming to enhance corrosion resistance of steel cup, the formability of pure titanium clad sheet by multistage deep drawing was investigated. Since pure titanium has excellent corrosion resistance, the use of the pure titanium sheet is very effective as the anticorrosion coating for steel. The blank was constituted by interposing steel between two sheets of pure titanium sheets. In the experiment, the materials were pure titanium sheets TP270, ultralow-carbon steel SPCC, and stainless steel SUS316L. The initial thickness of the sheet was 0.2 to 0.5 mm in thickness. A total plate thickness of the blank was 1.0 mm. In the deep drawing process, the blank was employed and a flat sheet blank was formed into a circle by a punch. Various cups were drawn by exchanging the punch and die. The die was a conical shape without a blankholder in the subsequent stages. For the prevention, pure titanium blank was treated by oxide coating. By this method, the fresh and clean titanium is not in direct contact with the die during the forming due to the existence of the oxide layer. By oxide coating, the titanium sheet has sufficient ability in preventing the seizure in multistage deep drawing. It was found that the titanium clad cups were successfully drawn.
  • 原田 泰典, 田中 秀星, 中谷 正憲
    関西支部講演会講演論文集 2015年
    The effect of microshot peening on the surface characteristics and fatigue life of spring steel was investigated. In the experiment, the projective method of the microshot was of the compressed air type. The microshots were high-carbon cast steel and cemented carbide, and the workpiece used was the commercially spring steel. The surface layer of the workpiece was sufficiently deformed by microshot peening. The microshot peening process was very efficient in improving the fatigue life of spring steel. It was found that the use of the microshot was found to cause a significantly enhanced peening effect for spring steel.
  • 原田 泰典, 福田 泉, 山本 厚之
    関西支部講演会講演論文集 2015年
    The effect of shot peening on the bending strength of an AZ31 magnesium alloy pipe was investigated. In the experiment, extruded pipes of 22 mm 0.D., 18 mm I.D., and 2 mm wall thickness were used. Shot peening treatments were applied to the surface of the workpiece using an impeller-type or an air-type peening machine. It was found that multiple deformation twins were formed during shot peening. The results of the present study revealed that the compressive yield stress of shot-peened pipes is strongly related to their bending strength.
  • 太田垣 朝久, 中谷 正憲, 原田 泰典
    M&M材料力学カンファレンス 2015年
    Fatigue crack initiation behavior of shot-peened magnesium alloy AZ31 was investigated. Fatigue tests were conducted using a rotary bending fatigue testing machine. The fatigue specimens were machined from two directions. Their loading directions are parallel and perpendicular to rolling direction. In the finite life regime, the shot peening improved the fatigue life significantly and the anisotropy in fatigue life disappeared by shot peening. On the other hand, fatigue limit of peened specimen was almost the same in comparison with that of untreated specimen. And the anisotropy in fatigue limit still remained. The crack initiation behaviors at stress amplitude of 115MPa were observed using an optical microscope. The small crack was initiated along the twin boundary at the early stage of fatigue life even in shot peened specimen. However, the crack growth was delayed by shot peening, resulting in the improvement of fatigue life in shot peened specimen.
  • 芝崎 和馬, 直井 聡汰, 原田 泰典
    機械材料・材料加工技術講演会講演論文集 2015年
  • 佐伯 優斗, 原田 泰典, 服部 兼久, 渡邊 吉弘
    機械材料・材料加工技術講演会講演論文集 2015年
  • 松本 実, 原田 泰典, 布引 雅弘, 高橋 勝彦
    機械材料・材料加工技術講演会講演論文集 2015年
  • 服部 修治, 上山 穣, 原田 泰典
    機械材料・材料加工技術講演会講演論文集 2015年
  • 原田 泰典
    機械材料・材料加工技術講演会講演論文集 2015年
  • 野瀬田 翔伍, 服部 修治, 上山 穣, 原田 泰典
    機械材料・材料加工技術講演会講演論文集 2015年
  • 上山 穣, 服部 修治, 原田 泰典
    機械材料・材料加工技術講演会講演論文集 2015年
  • 原田 泰典
    Mechanical surface tech = メカニカル・サーフェス・テック : 表面改質&表面試験・評価の技術情報誌 2014年12月
  • 原田 泰典, 田中 秀星, 伊藤 学
    年次大会 2014年
    The effect of an intermittent microshot peening on the surface characteristics and fatigue life of spring steel SUP9 was investigated. In the experiment, the projective method of the microshot was of the compressed air type. The microshot of 0.1mm diameter was high-carbon cast steel, and the workpiece used was the commercially spring steel. The effect of the intermittent peening on the surface hardness was studied. Fatigue tests were carried out in a rotary bending fatigue test machine. The surface layer of the workpiece was sufficiently deformed by microshot peening. S-N curves were established for unpeened and peened conditions. The intermittent peening process improves the fatigue life, especially at a high number of cycles.
  • 原田 泰典, 長尾 篤, 布引 雅之, 高橋 勝彦
    年次大会 2014年
    The formation of an Fe-Al intermetallic compound film on lightweight metals by shot lining and heat treatment was investigated. In the experiment, a centrifugal-type peening machine with an electrical heater was employed. The shot medium was high-carbon cast steel. The substrate was a commercial aluminium alloy and magnesium alloy. The sheet was commercially available pure aluminum, and the powder was an electrolytic iron. The shot lining process was carried out at 573 K in air using a peening machine. The top surface of the lined workpiece was melted by laser beam irradiation. The lined substrates exhibited a harder layer of aluminum-rich intermetallics in the irradiated part. It was confirmed that the present method could be used for the formation of functional films on lightweight metals.
  • 阿部 浩之, 中谷 正憲, 原田 泰典, 内田 仁
    関西支部講演会講演論文集 2014年
  • 清水 翔太, 中谷 正憲, 原田 泰典
    関西支部講演会講演論文集 2014年
  • 眞田 陽平, 中谷 正憲, 原田 泰典
    関西支部講演会講演論文集 2014年
  • 中谷 正憲, 太田垣 朝久, 原田 泰典
    M&M材料力学カンファレンス 2014年
    The effect of shot peening on the fatigue strength in an artificial aged magnesium alloy AZ80 was investigated. The cast ball with an average diameter of 0.1mm was used for shot peening and the Almen intensity was set to 0.15 and 0.40mmN. The specimen surface became rough with an increase in Almen intensity. Shot peening at low Almen intensity improved the fatigue strength. However, the shot peening at high Almen intensity decreased the fatigue strength. In the specimen loaded parallel to extrusion direction, the polishing after shot peening improves the fatigue life. On the other hand, the fatigue life of the specimen loaded perpendicular to extrusion direction decreased by polishing after shot peening. This may be resulted from the difference of distribution of β phase precipitated by aging treatment.
  • Masayuki Nunobiki, Yasunori Harada, Koichi Okuda
    Advanced Materials Research 2014年1月1日
    ? (2014) Trans Tech Publications, Switzerland. Recently, the demand for long life to industrial products has risen. The high strength alloy coating on necessary part can decrease a manufacturing cost for life prolongation. This study proposes a laser surface alloying method to form an Fe-Al alloy coating on a carbon steel. By laser heating to an Al foil stuck on the steel, the mutual diffusion proceeds and the Fe-Al alloy grows. The material property of the generated alloy is greatly different according to a heat treatment temperature. For example, Fe3Al grows at 950 °C or more, and it has high toughness. A furnace heating effects the properties of inside of base material negatively. A high-frequency heating is not suitable for a local surface reforming. The laser processing is suitable for a local surface reforming. A defocused CO2 laser was irradiated to the Al foil stuck on the steel block by the shot lining in various processing conditions. The metal structures of the laser irradiated area was observed, to search for the suitable processing conditions for alloy coating. It was clarified that a local Fe-Al alloy coat was able to be formed without change of the properties of base material by high speed laser scanning.
  • Izumi Fukuda, Yasunori Harada, Shunpei Ohtsuka
    Procedia Engineering 2014年1月1日
    ? 2014 The Authors. Published by Elsevier Ltd. This paper deals with effect of temperature on stretchability of anisotropic AZ31(Mg-3%Al-1%Zn) magnesium alloy sheet. Results of stretching process test are compared with those of tensile test. The sheet has an anisotropic character for angle to hotextrusion direction(φ=0°, 45°, and 90°). Here, φ=0° means a direction of extrusion. Tensile specimens cut down to three directions of φ=0°, 45°, and 90° are a shape of 14mm in elongation, 3mm in width and 0.44mm in thickness. Test piece for investigating the limiting stretching stroke is a sheet of side length 90mm and 0.44mm in thickness. For the stretching process test, the punch head is a hemispheric shape of 20mm in diameter and the die is a cylindrical shape of 27mm in inside diameter. Both tension and stretching process tests were performed at four kinds of test temperature(T=293, 393, 473, and 573K) in a thermostatic chamber and at a crosshead speed(v) of 5 mm/min using an Instron-type testing machine. Comparing the limiting stretching stroke determined by the stretching test with elongation, r-value, and n-value obtained by the tensile test, it is confirmed that the limiting stretching stroke is qualitatively related to the elongation and r-value, and not to n-value.
  • Yasunori Harada, Yutaro Maeda, Minoru Ueyama, Izumi Fukuda
    Procedia Engineering 2014年1月1日
    ? 2014 The Authors. Published by Elsevier Ltd. The improvement of formability has been investigated in the multistage deep drawing of beta titanium alloy sheet. The beta titanium alloys have good cold workability in the metal forming. However, a seizure tends to occur during metal forming due to high reactivity with other metals. The occurrence of the seizure becomes remarkable in sever forming operations such as deep drawing and ironing. Especially, it is hard to prevent the occurrence of seizure in multistage deep drawing process. In this study, to improve the formability of titanium alloy sheet, the formability in multistage deep drawing process of beta titanium alloy was investigated. The blank used was the commercial beta titanium alloy Ti-15V-3Cr-3Sn-3Al. To prevent the occurrence of seizure, the blank treated by oxide coating was used. The coated sheet was not in direct contact with the tools of die and punch during deep drawing due to the existence of the oxide layer. The effects of the surface roughness and hardness on the formability in the multistage deep drawing processes were examined. The improvement of surface roughness of drawn cup was also attempted by using heat treatment. A long titanium alloy cup was successfully formed by intermediate annealing at the 3rd stage. The drawn cup by multistage deep drawing could be formed to the 6th stage. It was found that the beta titanium alloy sheet covered with oxide layer has sufficient ability in preventing the seizure in multistage deep drawing processes.
  • Yasunori Harada, Hiroki Kosaka, Makoto Ishihara
    Steel Research International 2013年12月1日
    The shot peening process is a widely used surface treatment method for improving fatigue strength and anti-wear characteristics. The surface of the material receives a so-called peening effect where strong local deformation forms a work-hardened layer or causes compressive residual stress. In the present study, the effect of shot peening on fatigue strength of high-toughness spring steel was investigated. The optimum conditions were evaluated in an experiment using the conventional shot peening machine with shots of an average size. The projective method of the shot media was of the centrifugal peening type. The shot media of 1.0 mm diameter was high-carbon cast steel, and the workpiece used was the commercially spring steel JIS-SUP10. The effects of peening time have primarily on surface characteristics and fatigue strength were studied. Fatigue tests were carried out in a plane-bending test machine. S-N curves were established for unpeened and peened conditions. The main results were as follows: the surface layer of the workpieces was sufficiently deformed by shot peening. The residual stress was added in the surface vicinity on all peened workpieces. As the peening time increased, the region with residual stress extends in the depth direction. The value of maximum compressive residual stress was about 950 MPa. At a large number of cycles to fracture, shot peening could more effectively enhance the fatigue strength. When shot velocity was 60 m s-1, the maximum fatigue strength was about 525 MPa with a peening time of 90 s. This peening time was nearly equal to the full coverage time. It was found from the present experiment that the optimum peening time for the conventional shot peening was about 90 s. Shot peening using conventional cast steel shots is conducted for the purpose of improving the fatigue characteristics of spring steel. To examine the effect of shot peening on fatigue strength, fatigue tests are carried out in a plane-bending test machine. It is found that the full-coverage time, 90 s, is required in order to improve the fatigue life. ? 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
  • 原田 泰典, 布引 雅之
    銅と銅合金 : 銅及び銅合金技術研究会誌 = Copper and copper alloy : journal of Japan Research Institute for Advanced Copper-Base Materials and Technologies 2013年
  • 原田 泰典
    天田財団助成研究成果報告書 = Report of grant-supported researches the Amada Foundation 2013年
  • 原田 泰典, 上坂 浩貴
    年次大会 2013年
    The shot peening process is a widely used surface treatment method for improving fatigue strength and anti-wear characteristics. The surface of the material receives a so-called peening effect where strong local deformation forms a work-hardened layer or causes compressive residual stress. In the present study, the effect of peening time on surface hardness of spring steel was investigated. The optimum conditions were evaluated in an experiment using the conventional shot peening machine with shots of an average size. The projective method of the shot media was of the centrifugal peening type. The shot media of 1.0 mm diameter was high-carbon cast steel, and the workpiece used was the commercially spring steel JIS-SUP10. It was found from the present experiment that the optimum peening time for the conventional shot peening was about 90 s.
  • 原田 泰典, 石田 誠
    年次大会 2013年
    In the shot peening process, metal foil can be bonded with the base metal by applying plastic deformation and the pressure. The formation of an Fe-Al intermetallic compound film on high-speed tool steel by shot peening and heat treatment was investigated. The effect of heating temperature on intermetallic formation of pure aluminum and base material bonded by shot peening was studied. In the experiment, a centrifugal-type peening machine with an electrical heater was employed. The shot peening process of high-speed tool steel with an aluminum sheet was carried out to evaluate the characteristics of the formed film. Heat treatment was performed at diffusion temperatures from 923 to 1573K in vacuum. When the temperature of the lined substrates was more than 1173K, the surface was covered with highly anticorrosive layers of Fe-rich intermetallics. It was confirmed that the present method could be used for the formation of functional films on high-speed tool steel.
  • 原田 泰典, 山本 厚之, 松澤 幸典, 後藤 崇之, 中村 英次
    関西支部講演会講演論文集 2013年
  • 原田 泰典, 石田 誠, 高橋 勝彦
    関西支部講演会講演論文集 2013年
  • 清水 翔太, 中谷 正憲, 原田 泰典
    M&M材料力学カンファレンス 2013年
    Fretting fatigue behavior and mechanical property of Ti-6Al-4V coated with titanium nitride (TiN) by ion beam assisted deposition were investigated. To investigate the influence of mixed layer on the fretting fatigue behavior, TiN were deposited of an acceleration voltage of 0.2 and 2keV. Mixed layer became thick with an increase in acceleration voltage. Adhesion and wear resistance improved with increasing acceleration voltage. TiN coating increase the fretting fatigue life. The fretting fatigue life of the specimen coated with TiN of an acceleration voltage of 2keV was two times longer than that of the specimen coated with TiN of an acceleration voltage of 0.2keV. In conclusion, thicker mixed layer caused higher adhesive strength and wear resistance, resulting in long fretting fatigue life.
  • 阿部 浩之, 中谷 正憲, 原田 泰典, 内田 仁
    M&M材料力学カンファレンス 2013年
    The influence of specimen cutting direction on the susceptibility of stress corrosion cracking (SCC) in an extruded magnesium alloy AZ80 was investigated. The materials were extruded after the T4 or T6 heat treatment. The L- and R-specimens were prepared in the extrusion and radial directions respectively. SCC susceptibility was evaluated by a slow strain rate tensile test in 0.004wt% NaCl solution SCC susceptibility of L-specimen was higher than that of R-specimen. This is because of the difference in the SCC susceptibility. On the other hand, the SCC susceptibility of R-specimen increased by T6 heat treatment, resulting from the precipitation of p phase. These results suggest that SCC susceptibility of magnesium alloy is related with texture orientation.
  • 眞田 陽平, 中谷 正憲, 原田 泰典
    M&M材料力学カンファレンス 2013年
    The Young's modulus of free-standing Cu/Al_2O_3 multilayer thin film was investigated by a method of micro-bending test. The Cu and Al_2O_3 monolayer and Cu/Al_2O_3 multilayer thin film were deposited on Si substrate by an electron beam deposition. Free-standing micro-beam specimens were fabricated using a focused ion beam system. The micro-bending tests were conducted using a nanoindenter at a load of lmN. Young's moduli of free-standing thin films were estimated by FE analysis including indentation displacement. Young's moduli of Cu and Al_2O_3 films were relatively close to those of each film on the Si substrate. However, the Young's modulus of Cu/Al_2O_3 film was much larger than that of Cu/Al_2O_3 film on substrate.
  • 原田 泰典
    機械材料・材料加工技術講演会講演論文集 2013年
  • 阿部 浩之, 中谷 正憲, 原田 泰典, 内田 仁
    機械材料・材料加工技術講演会講演論文集 2013年
  • 原田 泰典
    機械材料・材料加工技術講演会講演論文集 2013年

担当経験のある科目(授業)

 18

共同研究・競争的資金等の研究課題

 20