春山 雄一

It is necessary to manipulate and analyze single cells and organelles with high accuracy for a deeper understanding of their biological phenomena. For this purpose, bio nano-tools are very useful. We fabricated a bio nano-sensing probe by using focused-ion-beam chemical vapor deposition (FIB-CVD) and evaluated it using a cell of an Egeria densa leaf. We found that the probe functions as a measurement electrode. This indicates that the bio nano-sensing probe is useful for single organelle analyses.

The surface property of fluorinated diamond-like carbon (F-DLC) thin film, which is expected to be a new antisticking layer of nanoimprint mold, was evaluated with reference to the commercial diamond-like carbon (DLC) thin film formed by radio-frequency (RF) plasma chemical vapor deposition (CVD) and the fluorinated self-assembled monolayer (SAM). From the measurement of X-ray photoelectron spectrum (XPS), the surface of the F-DLC thin film was found to be overspread with hydrophobic CFx components. In addition, the durability of the F-DLC thin film was evaluated by the contact angle measurement of a water drop against repeating times of the thermal imprint process. After over 100 times of imprinting, the contact angles of the F-DLC thin film were almost kept constant with the initial value and a fine replicated pattern was obtained. From these results, the F-DLC thin film was found to be suitable as a novel antisticking layer of the thermal nanoimprint mold.

We have investigated the electronic and geometric structures of the Au-Si(100) surface as a function of annealing temperature by means of Si 2p and An 4f core-level photoemission spectroscopy and low energy electron diffraction (LEED). The 1 x 1, c(8 x 2) and 5 x 3.2 structures were obtained by annealing the Au-Si(100) surface at 250, 630 and 750 degrees C, respectively. From the intensity ratio of the An 4f to Si 2p spectra, it was found that the chemical composition was almost identical for the 1 x 1, c(8 x 2) and 5 x 3.2 structures. On the other hand, changes in the peak position and shape of the Si 2p and Au 4f spectra were observed when the 1 x 1/c(8 x 2) structure changed to the c(8 x 2)/5 x 3.2 structure. The spectral changes indicate that there are several components due to different Au-Si interactions. Based on the results of the Si 2p and Au 4f core-level photoemission analysis and LEED patterns, we discuss the electronic and geometric structures of the Au-Si(100) surface. (c) 2006 Elsevier B.V. All rights reserved.

We fabricated a silicon dioxide-based vacuum microcapsule using focused-ion-beam chemical-vapor-deposition (FIB-CVD) to realize three high-performance vacuum electronic micro-devices: a diode, a triode, and a sensor. We measured the electrical characteristics of diamond-like carbon (DLC) and silicon dioxide (SiO(2)) deposited using FIB-CVD, and found that they had characteristics that are useful in conductors and insulators, respectively, used in vacuum micro-device fabrication. Furthermore, to evaluate the inner vacuum of a microcapsule, a diode with a microcapsule was fabricated using FIB-CVD. By measuring the current-voltage (I-V) characteristics of the diode, it was demonstrated that the inner vacuum of the microcapsule was maintained. This result indicates that various high-performance three-dimensional vacuum micro-devices can be fabricated using FIB-CVD on any surface.

The contact angle on a diamond-like carbon (DLC) surface was controlled by synchrotron radiation (SR) under perfluorohexane (C6F14) gas atmosphere. It was found that the fluorocarbon group bonded to the DLC surface in the modified hydrophobic area from the measurement of X-ray photoelectron spectrum. The contact angle of a DLC surface was succeeded to increase from 73 degrees to 116 degrees by the SR irradiation with 400 mA center dot h at C6F14 gas pressure higher than 1.2 Pa.

Our investigation of diamond-like carbon (DLC) nanosprings with a 130nm spring-section diameter, which were fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD), showed for the first time that nanosprings can be stretched. We observed large displacements of the FIB-CVD nanosprings using in situ optical microscopy; in other words, the nanosprings showed behavior similar to that of macroscale springs. In addition, we investigated the dependence of the spring constant of DLC nanosprings on spring diameter. The spring constants, measured using commercially available cantilevers, ranged from 0.47 to 0.07 N/m. The diameter dependence of spring constant can be accurately expressed by the conventional formula for a coil spring. The estimated shear modulus of the DLC nano-springs was about 70 GPa. This value is very close to the value of conventional coil springs made of steel. Furthermore, we measured the stiffness of a DLC nanospring annealed at 1000 degrees C in vacuum. The stiffness was decreased to approximately half of the stiffness of the nanospring without annealing.

Electronic structures of oxide films on hot-dipped Zn-0.2%Al, Zn-5%Al, and Zn-55%Al coated steel sheets have been investigated by means of the synchrotron radiation photoemission spectroscopy and compared with those of Zn and Al pure metal sheets. The oxide films were prepared by 85 hour exposure in air saturated with water vapor at 323K. The oxide film on Zn-0.2%Al had the same photoemission spectrum as the pure Zn metal, while Zn-5%Al and Zn-55%Al were similar to the pure Al in the form of photoemission spectrum. It was found that the electronic structure of the oxide films and the depth profile of the ratio of zinc oxide to aluminum oxide are varied with the ratio of Zn to Al in the alloys. The corrosion resistance of Zn-Al alloys is discussed being related to the electronic structure of the oxide films.

We have investigated the Au-Si(111) interface as a function of the An coverage by the core-level photoemission spectroscopy. With increasing the An coverage, the spectral features in the Si 2p core-level changed remarkably and some fine structures in both Si 2p and Au 4f spectra were observed. Based on the curve fitting analysis, the Si 2p and Au 4f spectra at more than 20 angstrom An coverage were decomposed into three chemically different components, respectively. The assignments of their components were performed. In addition, we have compared these results for the Au-Si(I 1 1) interface with our previous study for the Au-Si(I 0 0) interface. It was found that the electronic structures for the Au-Si(I 1 1) interface is essentially identical to those of the Au-Si(l 0 0) interface except at the initial Au deposition. (c) 2006 Elsevier Ltd. All rights reserved.

Diamondlike-carbon (DLC) cantilevers were fabricated with a commercially available focused-ion-beam chemical-vapor-deposition (FIB-CVD) system using a beam of 30 keV Ga(+) ions, and the mechanical characteristics of the cantilevers were measured. Vibration frequency of the cantilevers was passively measured using scanning electron microscopy. Resonant frequency of DLC cantilevers fabricated at 0.1 - 0.5 pA beam current was found to be constant. The equivalent spring constant of the cantilevers was identified by squeezing the tip of a Si(3)N(4) cantilever and a DLC cantilever together. Using the measured displacement, the spring constant of the DLC cantilever was calculated as (1.1 +/- 0.2) x 10(-2) N/m. Furthermore, Young's modulus and the density of the DLC cantilevers were measured to be 187 +/- 32 GPa and (3.8 +/- 0.7) x 10(3) kg/m(3), respectively. The DLC cantilevers were used as mass sensors in an ultrasensitive sensing application. A small amount of DLC was deposited on the tip of a DLC cantilever as a mass adhesion by FIB-CVD at 0.5 pA beam current. As a result, the authors were able to measure a small amount of mass shift in the femtogram range using a DLC cantilever. (c) 2006 American Vacuum Society.

The formation of microprotuberances on poly(tetrafluoroethylene) (PTFE) sheet by using synchrotron radiation (SR) was investigated. The PTFE surfaces irradiated by SR were observed with scanning electron microscope. The microprotuberances were formed on the PTFE surface by SR exposure at a substrate temperature over 150 degrees C. On the other hand, they were not observed at a substrate temperature of under 120 degrees C. The formation rate of microprotuberance remarkably increased above the glass transition temperature of PTFE. (c) 2006 Elsevier Ltd. All rights reserved.

Au-coated nanosprings were fabricated by a combination of focused-ion-beam chemical vapor deposition (FIB-CVD) and sputter coating. A Au thin layer was successfully coated onto nanosprings fabricated by FIB-CVD. To confirm the mechanical motion, the authors performed an optical microscopy observation in which the Au sputter-coated nanosprings were able to expand and contract mechanically, as flexibly as macroscale springs. The measured spring constants of the Au-coated nanosprings ranged from 0.27 to 16 N/m, depending on the coil-section diameter. In addition, through the quantitative measurement of the mechanical characteristic of the nanosprings, the authors estimated that Au-coated nanosprings had a sufficient mechanical strength, which is useful for application in nanoelectromechanical system with three dimensions. (c) 2006 American Vacuum Society.

We investigated the effect of oxygen (O-2) plasma irradiation on hydrogen silsesquioxane (HSQ) pattems replicated by room-temperature nanoimprinting. The HSQ-imprinted patterns with rectangular shapes changed when heated to 200 degrees C. Furthermore, they disappeared immediately when they were placed on a hot plate at a temperature of 300 degrees C. In contrast, 02 plasma preirradiation of HSQ-imprinted nanostructures prevented the pattern deformation during postbaking. Even at the high annealing temperature of 1000 degrees C, HSQ-replicated patterns with 200 nm linewidth, retained its initial pattern profiles. The measured water contact angle of O-2-plasma-irradiated HSQ surface decreased from 104 to 25 degrees. The relative intensity of O 1s/Si 2p of the O-2-irradiated HSQ surface, measured by X-ray photoemission spectroscopy increased from 3.13 to 4.23. These values were very close to those of thermally grown SiO2 (26.2 degrees and 4.87).

The surface modification of poly(tetrafluoroethylene) (PTFE) sheet was carried out by exposing the sheet to synchrotron radiation (SR) ranging 50 - 1000 eV under O-2, H2O and CH3OH gas atmospheres. The wettability of the PTFE surface was found to increase with SR dose under each gas atmosphere. The rate of increase in the wettability of the PTFE surface exposed to SR under the O-2 gas atmosphere was higher than those of the PTFE surfaces exposed to SR under the other gas atmospheres. The decrease in the amount of -CF2 component and the presence of -C=O and -OH components were observed on a hydrophilic PTFE surface.

The reaction mechanism for the direct photoetching of poly,(tetrafluoroethylene) (PTFE) using synchrotron radiation (SR) in the soft X-ray region, which is important for the microfabrication of PTFE nanoparts, was investigated by varying the photon flux irradiated to a PTFE sheet by changing the electron current of the storage ring. The etching depth of the PTFE sheet by SR exposure at 100mA(.)h was measured at room temperature, 120 and 200 degrees C. Etching depth increased with photon flux despite of setting the SR exposure on the same quantity at each substrate temperature. It was found that the etching of PTFE proceeds not only via the first-order reaction but also via the second-order reaction whether substrate temperature was higher than glass transition temperature.

Fluorinated diamond-like carbon (F-DLC) has recently been applied as an antisticking layer on nanoimprint molds for semipermanent use, replacing the self-assembled monolayer currently used. An SiO2/Si mold was successfully coated with an F-DLC thin layer by chemical vapor deposition (CVD). The measured water contact angle of the F-DLC surface was 103 degrees, which is 30 degrees higher than that of the DLC surface. This value indicates the adequacy of F-DLC as an antisticking layer. Moreover, an F-DLC film had a high hardness of 24 GPa, similar to that of a DLC film (26 GPa). AZ resist patterns of 150 nm linewidth and 350 nm pitch were successfully obtained by thermal nanoimprinting using an F-DLC-coated mold. Finally, after repeating the imprinting for more than 100 times, the initial water contact angle of 103 degrees for the surface of the F-DLC-coated mold was maintained.

The control of wettability on a diamond- like carbon (DLC) surface was carried out by exposure to synchrotron radiation (SR) in the soft X-ray region under the perfluorohexane (C(6)F(14)) gas atmosphere. It was found that the contact angle of a water drop against the DLC surface increased with SR dose; in particular, it increased from 73 to 91 degrees by the SR exposure of a 1 mA(.)h dose. The formation of the hydrophobic DLC surface was attributable to the fluorine-functional groups that existed on the DLC surface after SR exposure under the C(6)F(14) gas atmosphere.

We carried out the field-emission characterization of materials, such as diamond-like carbon (DLC), W, and Fe, deposited by focused-ion-beam chemical vapor deposition (FIB-CVD) to develop a field emitter to be used as a nano-tool for spot deposition. As a result, the threshold voltage of the field emission from the DLC was lower than those from the W and Fe. In addition, we measured the work functions of the se materials using photoelectron spectroscopy and found that DLC has a low work function. Furthermore, a field emitter with a DLC tip as a cold cathode was fabricated on a glass capillary, because it was found to be able to emit electrons from the DLC using a low voltage. We also confirmed that electrons were emitted from a DLC tip fabricated by FIB-CVD.

Various shapes of three-dimensional nano-rotor have been fabricated using nano-sheet made by 30 kV Ga+ focused-ion-beam chemical-vapor-deposition (FIB-CVD) in the current range from 5 to 200 pA with phenanthrene vapor as a precursor. A nano-rotor moving has been observed using electrostatic attractive force and nitrogen gas blowing. Furthermore, the operational stability of four wings rotor with a longer axis has been confirmed by nitrogen gas blowing. (c) 2006 Elsevier B.V. All rights reserved.

We evaluated the growth characteristics of amorphous carbon (source gas: C14H10) fabricated by focused-ion-beam (FIB) and electron-beam (EB) chemical-vapor-deposition (CVD) in the same apparatus environment. All experiments were carried out in a Ga FIB and SEM composite system. It is confirmed that there are some differences in the surface appearance of pillars fabricated by FIB-CVD and EB-CVD. The rate at which an FIB-CVD pillar grows is about 100 times faster than that of an EB-CVD pillar. We found FIB-CVD wiring has electrical conductor properties with a resistivity of 380 Q cm, and EB-CVD wiring has electric-insulator properties. Furthermore, we demonstrated by fabricating spring-shape features that FIB-CVD is superior to EB-CVD for making 3D structures. (c) 2006 Elsevier B.V. All rights reserved.

Our group wants to achieve subcellular manipulations and analysis in nano-space. Highly functional bio nano-tools are required to achieve this. Thus, it is necessary to make these tools three-dimensional nano-structure devices with focused-ion-bearn chemical-vapor-deposition (FIB-CVD) to optimize their performance. FIB-CVD is a key technology for fabricating three-dimensional structures. Two kinds of bio nano-tools were developed for subcellular manipulations and analysis. The first was a cell wall cutting tool (CWCT) to selectively cut cell walls in local areas. That is, cell walls could be removed without damaging subcellular organelles with CWCT. We succeeded in doing this. We also fabricated a filtering tool with a nano-net structure on a glass capillary to capture subcellular organelles. We conducted a successful experiment on capturing chloroplasts in a cell with the filtering tool. (c) 2006 Elsevier B.V. All rights reserved.

The chemical composition and components of a polytetrafluoroethylene (PTFE) surface was investigated as a function of the temperature under the irradiation of synchrotron radiation (SR) by the X-ray photoelectron spectroscopy (XPS). When the temperature of PTFE tinder the SR irradiation was less than 100 degrees C, the C-rich surface appeared. With increasing the temperature more than 150 degrees C, the relative intensity of the F 1s peak to the C1s peak increased markedly. At the temperatures of 150-180 degrees C, the C-C component became small and the CF(2) component was dominant. With further increasing the temperature more than 200 degrees C, CF(3), CF and C-CF components grew in addition to CF(2) component. Based on these XPS results, the temperature effect on the chemical composition and components is discussed. (c) 2005 Elsevier Ltd. All rights reserved.

The Li Is XPS (X-ray Photoelectron Spectroscopy) spectra of LiMn2O4, which is one of the major positive-electrode materials in lithium-ion rechargeable batteries, and MnO2 as a reference material, were measured by a laboratory-type XPS spectrometer. The Li Is peak was not observed in the spectra excited by the Mg K-alpha line (1253.6 eV), because the Li Is peak overlapped the background of the Mn 3p peak of LiMn2O4. The photoionization cross section of Mn 3p was larger than that of Li Is for Mg K. excitation. Therefore, the XPS measurement of LiMn2O4 by soft X-ray synchrotron excitation was carried out at beamline BL-713 on NewSUBARU synchrotron facility. Excitation energies of 110, 120, 130, 140, 150 and 151.4 eV were selected. The Li Is peak was clearly observed in these XPS spectra. In order to investigate the excitation energy dependence, the area ratio of the Li Is and Mn 3p peaks in the XPS spectra was plotted against the excitation energy. As a result, when the excitation energy was I 10 eV, the area ratio had the maximum value.

High-performance nanotools are very important for nanoscale operation and analysis in the various research studies. To improve the performance of these tools, it is necessary to make three-dimensional (3-D) nano structure devices. We fabricated a 3-D electrostatic nanomanipulator with SiO2/DLC heterostructure by focused-ion-beam chemical vapor deposition (FIB-CVD). In this article, we report on the fabrication and movement check of the 3-D electrostatic nanomanipulator.

We have investigated the Au-Si(1 0 0) interface as a function of the An coverage by means of the valence band and Au 4f core-level photoemission spectroscopy. At the initial stage of the An deposition, deposited An atoms are close to the atomic An. With increasing the An coverage, it is considered that the An silicide is formed by the influence of the substrate Si atoms. From the relative intensity ratio of the An 4f core-level spectrum to the Si 2p core-level spectrum, the appearance of the 3D islands was suggested at more than 12 ML. This means that the An deposited surface is not homogeneous. In addition, it was found that there are two chemically different Au silicide components from the curve fitting analysis of the An 4f core-level spectrum at the higher Au coverage. (c) 2005 Elsevier B.V. All rights reserved.

Synchrotron radiation (SR) process for the production of hydrophilic surface on PTFE sheet was examined by the SR irradiation using the gas cell filled with O-2 gas. High hydrophilic surface was obtained by the SR irradiation under the O-2 gas atmosphere. O atoms existing hydrophilic surface were considered to couple dominantly to PTFE surface during the SR exposure. (c) 2005 Elsevier B.V. All rights reserved.

High performance nano-tools are very important for nano-scale operations and analysis in various researches. To achieve best performance, tools should be made as three-dimensional (3-D) nano-structured devices. Therefore, we have fabricated 3-D nano-tools by using focused-ion-beam chemical-vapor-deposition (FIB-CVD). Most recently, we used FIB-CVD to fabricate a novel 3-D nano-tool, a nano-net. Using this nano-net, we successfully captured polystyrene microspheres (diameter: 2.0 mu m). (c) 2005 Elsevier B.V. All rights reserved.

Photoexcitation process leading to a variation in the wettability of a poly(tetrafluoroethylene) (PTFE) surface induced by synchrotron radiation (SR) exposure in the soft X-ray region was investigated. It was found that two types of photoexcitation, that is, the formations of a hydrophobic surface and a hydrophilic surface, proceed on the PTFE surface with the exposure to SR. The formation rate of the hydrophobic surface strongly depended on substrate temperature.

Focused- ion-beam chemical vapor deposition (FIB-CVD) is an excellent technology for forming a free-space-nanowiring. At 295 K the electrical resistivity of a free-space-nanowiring made using phenanthrene as the source gas was 1 X 10(2) Omega cm. Adding tungsten hexacarbonyl to the phenanthrene reduced the electrical resistivity to 2 x 10(-2) Omega cm. The nanomechanical switch composed of a coil and a nanowiring has been fabricated by using free- space -nanowiring fabrication technology, and its operation has been confirmed by applying a voltage.

Nano-tools are very important for the subcellular operation and analysis in the bio-experiments. For giving the high-performance to nano-tool, we think that it is necessary to make tools the three-dimensional (3-D) nano-structure devices. Therefore, we have performed the 3-D nano tools fabrication by using Focused-Ion-Beam Chernical-Vapor-Deposition (FIB-CVD). This time, a nano-net as a novel 3-D nano-tool was fabricated by using FIB-CVD. And we succeeded in scooping the polystyrene micro-sphere witha diameter of 2.0 mu m by using a nano-net.

The Morpho-butterfly wing reflects interfered brilliant blue, which originates from nanostructures on its scales, for any incidence angle of white light. We have, for the first time, fabricated a Morpho-butterfly-scale quasi-structure using focused-ion-beam chemical-vapor-deposition (FIB-CVD) and observed brilliant blue reflection from this quasi-structure with an optical microscope. We measured the reflection from real Morpho-butterfly scales and from the quasi-structure with a photonic multi-channel spectral analyzer system. The reflection spectra of the quasi-structure were very similar to those of Morpho-butterfly scales.

Nanoimprint lithography (NIL) Si molds with protrusion- and hollow-defects were repaired by Ga(+) focused-ion-beam (FIB) direct etching and chemical-vapor-deposition (CVD). The usability of the repaired mold was confirmed by carrying out NIL on poly(methylmethacrylate) (PMMA). After the NIL process, Ga grains appeared on the etching-repaired mold, which was confirmed by scanning electron microscopy-energy dispersive spectrometry (SEM-EDS). The thresholds of ion dose and annealing temperature for Ga grain appearance are studied.

We have investigated the Au-Si(1 0 0) interface as a function of the An coverage by means of the Si 2p core-level photoemission spectroscopy. At the 1 ML deposition, the spectral feature changed remarkably. This indicates that the deposited An atoms interact with the surface Si atoms in this deposition range. With increasing the Au coverage at similar to3 ML the spectral feature become three-peak structures at 100.0, 99.4, and 99.0 eV. The appearance of the three-peak structures indicates the Au-Si alloy or Au silicide formation. With further increasing the An coverage, two peaks at 100.3 and 99.7 eV become dominant. From the curve fitting analysis, the photoemission spectrum at the higher An coverage was decomposed by three components. Two components at higher binding energy side were assigned to the surface Si atoms while a component at lower binding energy side was assigned to Si atoms in the amorphous silicide layer. (C) 2004 Elsevier B.V. All rights reserved.

Ten-undecenoic acid self-assembled multilayers were deposited on H-Si(111) surfaces and the surface morphology was investigated by atomic force microscopy (AFM). Namely, we studied the H-Si(111) surface modification of -COOH terminal functional groups. Characteristic islands of almost the same height are observed. From AFM images and transmission IR spectra, it was confirmed that multilayer deposition easily occurs through weak intermolecular interactions such as the Van der Waals force and hydrogen bond interactions. The growth mechanism and film structure were discussed.

The surface modification of a polyimide (PI) sheet using synchrotron radiation (SR) was carried out. The PI sheet was irradiated to white radiation ranging between 50-1000 eV in a vacuum chamber. The contact angle of the PI surface with a water droplet was found to decrease from 75 to 58 by the SR irradiation. The variation of chemical components of the PI surface was studied using X-ray photoelectron spectroscopy (XPS). The ratio of peak intensity from the O1s orbital to that from the C1s orbital increased remarkably by SR irradiation. The increase of wettability on the PI surface was ascribable to the production of an O-rich surface by SR irradiation in the soft X-ray region.

The three-dimensional (3D) nanostructure fabrication technology using focused ion beam chemical vapor deposition (FIB-CVD) is very effective for highly efficient 3D nanomechanical device fabrication. We can fabricate 3D nanostructure easily and freely with this fabrication technology using FIB-CVD. Here, we demonstrate the fabrication of various 3-D nano-electrostatic actuators and manipulators on a glass capillary by 30 keV Ga+ focused-ion-beam-assisted deposition with phenanthrene vapor as a precursor, and the operation of these actuators and manipulators by applying voltage onto a Au-coated glass capillary under an optical microscope is shown. Furthermore, the structural characteristics and functionalities of them are described in this paper.

Systematic results of the photoemission spectra for different core levels such as, Tm 4p, 5p and 3d in the mixed valent Tm-monochalcogenides (TmS, TmSe and TmTe) obtained by both experimentally and theoretically are reported. The effects of the electron-electron correlation due to the interaction between core-holes and 4f-electrons or the interaction between different configurations are considered to explain the spectral features, depending on the principal (n) and orbital quantum numbers of the core levels. Any sharp peak corresponding to a spin-orbital term is not observed especially from the n = 4 states. Instead, the multiplet structures are dominantly observed, and the physical identity of the spin-orbital peaks is totally or partially dissolved into the multiplets. Moreover, the electron-correlation effect is found to be dependent on the valence components (Tm2+ and Tm3+). In the case of the Tm 4p core level, in which the principal quantum number is identical with the valence 4 f, the correlation effect is stronger, and the configuration interaction is therefore considered to explain the spectral features. The photoemission spectra for the shallow core level Tm 5p also show the effect of electron correlation, but weaker than that for Tm 4p. This has been confirmed by the resonant photoemission spectroscopy taken at Tm 4d-4f absorption edges. In addition, the feature of Tm 3d photoemission spectra is discussed. All the experimental spectra are compared with the calculated ones. It is therefore understood that the electron correlation effect plays an important role on determining the various features in Tm 4p, 5p and 3d photoemission spectra.

The surface modification of a poly(tetrafluoroethylene) sheet was carried out by synchrotron radiation in the soft X-ray region. The poly(tetrafluoroethylene) substrate was exposed to synchrotron radiation while varying the substrate temperature from room temperature to 200degreesC. The contact angle of the modified surfaces with a water drop decreased from 96degrees to 72degrees by the irradiation at room temperature, while the contact angle increased to 143degrees by the irradiation at the substrate temperature of 200degreesC. Scanning electron microscopy suggested that this repellence was ascribable to the microstructure of the poly (tetrafluoroethylene) surface. We succeeded in controlling the wettability of the poly (tetrafluoroethylene) surface from hydrophobic to hydrophilic by irradiation of the soft X-ray light.

The effect of synchrotron radiation (SR) irradiation of a polytetrafluoroethylene (PTFE) surface was investigated using X-ray photoelectron spectroscopy (XPS). After the SR irradiation, the relative intensity of the F 1s peak to the C 1s peak decreased markedly. The chemical composition ratio of the F atoms to C atoms was estimated to be 0.29. From the curve fitting analysis of C 1s and F 1s XPS spectra, the chemical components and their intensity ratio were determined. The reason for the chemical composition change by the SR irradiation was discussed.

In this paper, we report fabrication and electrical evaluation of various air-wirings formed by FIB-CVD. The FIB system utilizing a beam of 30 keV Ga/sup +/ ion was applied to make air-wiring. We fabricated two kinds of air-wirings. One was fabricated using two phenanthrene (C4H10) source gases. The other was fabricated using a mixture gas of tungsten carbonyl (W(CO)6) and C4H10 source gases. Then the electrical resistivities were compared.

We have developed a nano-manipulator that can perform inclusion of nano parts and cell operation and an actuator that can be used by the micro- and nano-system by FIB-CVD.