S SATO, H ONO, S NOZAKI, H MORISAKI
NANOSTRUCTURED MATERIALS 5(5) 589-598 1995年6月 査読有り
Oxygen-containing silicon (Si) nanostructures have been prepared on Si and SiO2 substrates by evaporation of Si powder in an oxygen-containing argon atmosphere. The structure and composition have been investigated by transmission electron microscope (TEM), optical absorption measurements in the near infrared-to-near ultraviolet region, and electron spectroscopy for chemical analysis (ESCA). Intertwined chain-like nanostructures have been noted in the TEM micrographs of the samples. The electron diffraction pattern of the nanostructure indicates that it is an amorphous state with no detectable Si crystallites. None of the crystalline particles have been detected by ESCA, the spectrum showing the presence of SiO2 and SiOx (x < 2). The optical bandgap of the material estimated from the optical absorption measurements is 3.4 eV, which is substantially lower than that of SiO2 (similar to 8 eV). The as-deposited ultrafine particles exposed to ultraviolet light emit blue light, which is strong enough to be seen with the naked eye. The blue light emission has been attributed to a broad photoluminescence (PL) peak at 2.7 eV The decay time of the blue light emission determined from the transient PL measurements is about 3 nsec, which is seven orders of magnitude faster than the similar blue light emission from SiO2 glass.