山崎 典子

We studied the properties of the intracluster medium (ICM) of galaxy clusters to the outer regions observed with Suzaku. The observed that the temperature dropped by about ~ 30% from the central region to the virial radius of the clusters. The derived entropy profile agreed with the expectation from simulations within r500, while the entropy profile in r &gt r500 indicated a flatter slope than the simulations. This would suggest that the cluster outskirts were out of hydrostatic equilibrium. As for the metallicity, we studied the metal abundances from O to Fe up to ~ 0.5 times the virial radius of the galaxy groups and clusters. Comparing the results with supernova nucleosynthesis models, the number ratio of type II to Ia supernovae is estimated to be ~ 3.5. We also calculated not only Fe, but also O and Mg mass-to-light ratios (MLRs) with K-band luminosity. The MLRs in the clusters had a similar feature. © Czech Technical University in Prague, 2013.

小型X線天文衛星DIOS搭載に向けた低発熱型多入力SQUIDの開発を行った。DIOS衛星では冷凍機の仕様により、SQUID単体あたりの最大発熱量が20 nWと大幅に制約される。また、数百チャネルの素子を読み出すために周波数分割方式による多重化が行われる。そこで我々は、周波数分割方式による多重化システムで使用可能な低発熱型多入力SQUIDの開発を行っている。今回我々は、発熱量を20nWに抑えたこれまでにないSQUIDを目指し開発を行った。結果、ゲインが若干満たないものの、実用可能な低発熱型SQUIDの開発に成功した。また、同SQUIDの宇宙放射線による性能劣化を見積もるため、コバルト60を線源とした放射化試験も行い、軌道上で想定される被爆量の10倍でも劣化が見られないことを確認した。

Recent results of charge exchange emission from solar system objects observed with the Japanese Suzaku satellite are reviewed. Suzaku is of great importance to investigate diffuse X-ray emission like the charge exchange from planetary exospheres and comets. The Suzaku studies of Earth's exosphere, Martian exosphere, Jupiter's aurorae, and comets are overviewed. © 2012 WILEY-VCH Verlag GmbH &amp Co. KGaA, Weinheim.

超伝導転移端センサ(TES)型マイクロカロリーメータX線検出器は、入射X線光子を吸収して熱エネルギーに変換する吸収体と、吸収体の微小な温度変化を高精度で計測するTESとで構成される。本研究では、X線有感部の面積を広くするために、TESとほぼ同じ面積を有する吸収体をTES上に積層した全面吸収体構造を考案した。吸収体はTESを覆うかさ部とTESへ熱を伝えるステム部からなるマッシュルーム構造をしており、かさ部とTESの間には、絶縁層が挿入されている。この全面吸収体構造を有するTES型X線検出器のX線応答特性について報告する。

We present a detailed structural study of the hot ISM in the Galactic halo along the sight line toward the bright active galactic nucleus Mkn 421. The O VII and O VIII absorption lines were measured with the Low Energy Transmission Grating Spectrograph aboard Chandra toward Mkn 421, and the O VII and O VIII emission lines were observed in the vicinities of the sight line with the X-ray Imaging Spectrometer aboard Suzaku. We jointly analyzed the absorption and the emission spectra assuming exponential distributions of the gas temperature and density from the Galactic plane, and constrained the temperature and density at the plane to be 2.7(+0.6, -0.5) x 10(6) K and 1.5(+0.7, -0.5) x 10(-3) cm(-3), with the scale heights of 1.6(+3.6, -0.9) kpc and 5.1(> 1.2) kpc respectively. The results are consistent with those obtained in the LMC X-3 direction and the PKS 2155-304 direction, describing a thick disk-like hot gas with its height of a few kpc from the Galactic plane.

The SXS instrument is the Soft X-ray micro-calorimeter Spectrometer planned for the Japanese ASTRO-H satellite, scheduled to be launched in 2014. In this paper we describe the X-ray calibration sources used in this instrument. These sources use light sensitive photo-cathodes to generate electrons, which in turn generate the X-rays. This design has the unique property to allow for fast discrete pulsations of the generated X-rays. This enables the energy scale calibration of the instrument simultaneously with astronomical observations, without adding to the background in the astronomical data. Flight-model sources have been made, and a number of them have been operating in the past several months to monitor their behaviour. Here we report on the characterisation and performance of these sources. In addition, we will elaborate on the nature and expected accuracy of the energy calibration, in relation to the expected stability of the instrument, given the calibration source strength and its mode of operation.

Suzaku performed observations of 3 regions in and around the Shapley supercluster: a region located between A3558 and A3556, at similar to 0.9 times the virial radii of both clusters, and two other regions at 1 degrees and 4 degrees away from the first pointing. The 4 degrees-offset observation was used to evaluate the Galactic foreground emission. We did not detect significant redshifted Oxygen emission lines (O-VII and O-VIII) in the spectra of all three pointings, after subtracting the contribution of foreground and background emission. An upper limit for the redshifted O-VIII K alpha line intensity of the warm-hot intergalactic medium (WHIM) is 1.5 x 10(-7) photons s(-1) cm(-2) arcmin(-2), which corresponds to an overdensity of similar to 380 (Z/0.1 Z(circle dot))(-1/2)(L/3 Mpc)(-1/2), assuming T = 3 x 10(6) K. We found excess continuum emission in the 1 degrees-offset and on-filament regions, represented by thermal models with kT similar to 1 keV and similar to 2 keV, respectively. The redshifts of both 0 and that of the supercluster (0.048) are consistent with the observed spectra. The similar to 1 keV emission can be also fitted with Ne-rich Galactic (zero redshift) thin thermal emission. Radial intensity profile of 2 keV component suggests contribution from nearby clusters A3558 and A3556, but with significant steepening of the intensity slope in the outer region of A3558.

One of the instruments on the Advanced Telescope for High-Energy Astrophysics (Athena) which was one of the three missions under study as one of the L-class missions of ESA, is the X-ray Microcalorimeter Spectrometer (XMS). This instrument, which will provide high-spectral resolution images, is based on X-ray micro-calorimeters with Transition Edge Sensor (TES) and absorbers that consist of metal and semi-metal layers and a multiplexed SQUID readout. The array (32 x 32 pixels) provides an energy resolution of < 3 eV. Due to the large collection area of the Athena optics, the XMS instrument must be capable of processing high counting rates, while maintaining the spectral resolution and a low deadtime. In addition, an anti-coincidence detector is required to suppress the particle-induced background. Compared to the requirements for the same instrument on IXO, the performance requirements have been relaxed to fit into the much more restricted boundary conditions of Athena. In this paper we illustrate some of the science achievable with the instrument. We describe the results of design studies for the focal plane assembly and the cooling systems. Also, the system and its required spacecraft resources will be given.

DIOS (Diffuse Intergalactic Oxygen Surveyor) is a small scientific satellite with the main aim of searching warm-hot intergalactic medium using redshifted OVII and OVIII lines. The wide-field spectroscopic capability of DIOS will also bring rich science about the dynamics of cosmic hot plasmas in all spatial scales. The instrument will consist of a 4-stage X-ray telescope and an array of TES microcalorimeters with up to 400 pixels, cooled with mechanical coolers. Hardware development of DIOS and outstanding issues about the payload are described. DIOS will be further developed with international collaboration and will be proposed to the earliest call of JAXA's small scientific satellite series.

A bright, nearby edge-on starburst galaxy NGC 253 was studied using the Suzaku, XMM and Chandra X-ray observatories. Here, we focused on Suzaku and Chandra studies because of a good energy resolution with a low background and a sub-arcsecond spatial resolution. We detected with Suzaku complex line structure of Fe K, which is resolved into three lines (Fe-I at 6.4 keV, Fe-XXV at 6.7 keV and Fe-XXVI at 7.0 keV) around the center of NGC 253. Especially, the Fe-I and Fe-XXVI lines are the first clear detections, with a significance of >99.99 % and 99.89 % estimated by a Monte Carlo procedure. Imaging spectroscopy with Chandra revealed that the emission is distributed in similar to 60 arcsec(2) region around the nucleus, which suggests that the source is not only the buried AGN.

LiteBIRD [Lite (Light) satellite for the studies of B-mode polarization and Inflation from cosmic background Radiation Detection] is a small satellite to map the polarization of the cosmic microwave background (CMB) radiation over the full sky at large angular scales with unprecedented precision. Cosmological inflation, which is the leading hypothesis to resolve the problems in the Big Bang theory, predicts that primordial gravitational waves were created during the inflationary era. Measurements of polarization of the CMB radiation are known as the best probe to detect the primordial gravitational waves. The LiteBIRD working group is authorized by the Japanese Steering Committee for Space Science (SCSS) and is supported by JAXA. It has more than 50 members from Japan, USA and Canada. The scientific objective of LiteBIRD is to test all the representative inflation models that satisfy single-field slow-roll conditions and lie in the large-field regime. To this end, the requirement on the precision of the tensor-to-scalar ratio, r, at LiteBIRD is equal to or less than 0.001. Our baseline design adopts an array of multi-chroic superconducting polarimeters that are read out with high multiplexing factors in the frequency domain for a compact focal plane. The required sensitivity of 1.8 mu Karcmin is achieved with 2000 TES bolometers at 100mK. The cryogenic system is based on the Stirling/JT technology developed for SPICA, and the continuous ADR system shares the design with future X-ray satellites.

We found the intensity variations of OVII Ka line (0.56 keV) among the multiple observations of two blank sky fields toward NGC2992 and MBM16 with Suzaku. The OVII enhancement in the same line of sight are thought to be related to the Solar Wind Charge Exchange (SWCX) induced emission in the Helium Focusing Cone, depending the different observer's site by the yearly revolution around the Sun. We also simulated the SWCX induced OVII intensities reacted with the neutrals in the Heliosphere including the He Cone. The simulated OVII intensities were comparable to the observed intensity for MBM16 (dense molecular cloud within Local Hot Bubble), while the simulation amounted to about half of the observation for NGC2992. The origin of the half of observed OVII toward NGC2992 is thought to the distant hot plasma of our Galaxy.

Recent results of solar system planets observed with the Japanese X-ray astronomy satellite Suzaku are reviewed. Thanks to the low instrumental background and good energy resolution, X-ray CCDs onboard Suzaku are one of the best probes to study diffuse X-ray emission. An overview of the Suzaku data of Jupiter and Earth is presented, along with preliminary results of Mars. Firstly, diffuse hard X-ray emission is discovered in 1-5 keV at Jovian radiation belts. Its spectrum is represented by a power-law continuum with a photon index of ∼1.4. This emission could originate from inverse-Compton scattering of solar photons by tens MeV electrons. Secondly, variable diffuse soft X-rays are serendipitously found during observations in the directions of the north ecliptic pole and galactic ridge. Good time correlations with the solar wind and emission lines found in the X-ray spectra are firm evidences of a solar wind charge exchange emission with Earth's exosphere. Thirdly, diffuse X-ray emission from Martian exosphere via the solar wind charge exchange is investigated for the first time at solar minimum. A stringent upper limit on the density of the Martian exosphere is placed from the Suzaku data. © 2010 COSPAR. Published by Elsevier Ltd. All rights reserved.

Microelectromechanical systems (MEMS) micropore X-ray optics were proposed as an ultralightweight, high-resolution, and low cost X-ray focusing optic alternative to the large, heavy and expensive optic systems in use today. The optic's monolithic design which includes high-aspect-ratio curvilinear micropores with minimal sidewall roughness is challenging to fabricate. When made by either deep reactive ion etching or X-ray LIGA, the micropore sidewalls (reflecting surfaces) exhibit unacceptably high surface roughness. A magnetic field-assisted finishing (MAF) process was proposed to reduce the micropore sidewall roughness of MEMS micropore optics and improvements in roughness have been reported. At this point, the best surface roughness achieved is similar to 3 nm Rq on nickel optics and similar to 0.2 nm Rq on silicon optics. These improvements bring MEMS micropore optics closer to their realization as functional X-ray optics. This paper details the manufacturing and post-processing of MEMS micropore X-ray optics including results of recent polishing experiments with MAF.

X-ray optics based on MEMS technologies can provide future astronomical missions with ultra light-weight and high-performance optical systems. Curvilinear micropores vertical to a thin wafer are made by using DRIE (Deep Reactive Ion Etching) or X-ray LIGA. The side walls are smoothed by using magnetic field assisted finishing and annealing technologies in order that the walls can reflect X-rays. Two or four such wafers are bent to spherical shapes with different curvature of radii and stacked, to focus parallel X-rays from astronomical objects by multiple reflections. In this paper, the concept and recent advances of the MEMS X-ray optics are reviewed. ©2010 IEEE.

An X-ray imaging test for an X-ray optical system based on MEMS technologies was conducted at the ISAS 30 m beamline. An X-ray reflection and focusing were successfully verified at Al Kα 1.49 keV for the first time. The image quality estimated as a half power diameter was ∼20 arcmin. This was consistent with the angular resolution estimated from the surface roughness of 200 nm rms at 100 ìm scale. In this paper, the experimental setup and the result of X-ray imaging analysis are reported. ©2010 IEEE.

The SXS instrument is the Soft X-ray micro-calorimeter Spectrometer planned for the Japanese ASTRO-H satellite, scheduled to be launched in 2014. In this paper, the trade off and modelling for the X-ray absorption and optical blocking filters will be described. The X-ray absorption filter will optimize the efficiency for high spectral resolution observations for bright sources at higher energies (notably around the Fe-K line at 6.4 KeV), given the characteristics of the instrument while the optical blocking filter allows X-ray observations of optically bright sources. For this mission a novel type of on-off-switchable X-ray calibration source, using light sensitive photo-cathodes, is being developed, which will be used for gain calibration and contamination monitoring. These sources will be used by both the SXS and SXI (Soft X-ray Imager) instruments and have the capability to be pulsed at millisecond intervals. Details of these sources will also be discussed.

The Soft X-ray Spectrometer (SXS) instrument on the Astro-H observatory is based on a 36 pixel x-ray calorimeter array cooled to 50 mK in a sophisticated spaceflight cryostat. The SXS is a true spatial-spectral instrument, where each spatially discrete pixel functions as a high-resolution spectrometer. Here we discuss the SXS detector subsystem that includes the detector array, the anticoincidence detector, the first stage amplifiers, the thermal and mechanical staging of the detector, and the cryogenic bias electronics. The design of the SXS detector subsystem has significant heritage from the Suzaku/XRS instrument but has some important modifications that increase performance margins and simplify the focal plane assembly. Notable improvements include x-ray absorbers with significantly lower heat capacity, improved load resistors, improved thermometry, and a decreased sensitivity to thermal radiation. These modifications have yielded an energy resolution of 3.5-4.0 eV FWHM at 6 keV for representative devices in the laboratory, giving considerable margin against the 7 eV instrument requirement. We expect similar performance in flight.

One of the instruments on the International X-ray Observatory (IXO), under study with NASA, ESA and JAXA, is the X-ray Microcalorimeter Spectrometer (XMS). This instrument, which will provide high spectral resolution images, is based on X-ray micro-calorimeters with Transition Edge Sensor (TES) with absorbers that consist of metal and semi-metal layers and a multiplexed SQUID readout. The requirements for this instrument are demanding. In the central array (40 x 40 pixels) an energy resolution of <2.5 eV is required, whereas the energy resolution of the outer array is more relaxed (approximate to 10 eV) but the detection elements have to be a factor 16 larger in order to keep the number of read-out channels acceptable for a cryogenic instrument. Due to the large collection area of the IXO optics, the XMS instrument must be capable of processing high counting rates, while maintaining the spectral resolution and a low deadtime. In addition, an anti-coincidence detector is required to suppress the particle-induced background. In this paper we will summarize the instrument status and performance. We will describe the results of design studies for the focal plane assembly and the cooling systems. Also the system and its required spacecraft resources will be given.

DIOS (Diffuse Intergalactic Oxygen Surveyor) is a small scientific satellite with a main aim for the search of warm-hot intergalactic medium using redshifted OVII and OVIII lines. The instrument will consist of a 4-stage X-ray telescope and an array of TES microcalorimeters with 256 pixels, cooled with mechanical coolers. Hardware development of DIOS and the expected results are described. Survey observations over about 5 degrees x 5 degrees area will reveal new filamentary structures. DIOS will be proposed to the 3rd mission in JAXA's small satellite series in 2011, aiming for launch around 2016 if it will be selected.

A magnetic field-assisted finishing process has been studied for high-aspect-ratio ion-etched silicon curvilinear micropore structures, which have potential application as mirrors for satellite-borne X-ray telescopes. The micropore sidewalls act as X-ray focusing mirrors, and lead to reductions in the mass-to-effective-area ratio of 10-1000 times, compared to traditional X-ray telescopes. This paper describes the processing principle for the surface finishing of the sidewalls of micropore structures (10, 20 μm and depth: 300 μm (aspect ratio ≈ 15, 30)), and the feasibility of achieving roughness ∼4 nm rms and improving the X-ray reflectivity of micropore sidewall surface are demonstrated. © 2010 CIRP.

We are developing an ASTRO-H data analysis framework with the Geant4-based Monte Carlo simulation core, and numerical models of the on-orbit environmental radiation and full-satellite mass structure. In addition, the framework also includes a mechanism to connect and control data processing modules that are developed independently and data communication channels among them, which has been technically proven by simulations and analysis of the Suzaku HXD, many other detectors and astrophysical issues. © 2010 SPIE.

We present the science and an overview of the Soft X-ray Spectrometer onboard the ASTRO-H mission with emphasis on the detector system. The SXS consists of X-ray focusing mirrors and a microcalorimeter array and is developed by international collaboration lead by JAXA and NASA with European participation. The detector is a 6×6 format microcalorimeter array operated at a cryogenic temperature of 50 mK and covers a 3′ ×3′ filed of view of the X-ray telescope of 5.6 m focal length. We expect an energy resolution better than 7 eV (FWHM, requirement) with a goal of 4 eV. The effective area of the instrument will be 225 cm2 at 7 keV by a factor of about two larger than that of the X-ray microcalorimeter on board Suzaku. One of the main scientific objectives of the SXS is to investigate turbulent and/or macroscopic motions of hot gas in clusters of galaxies. © 2010 SPIE.

The Soft X-ray Spectrometer (SXS) is a cryogenic high resolution X-ray spectrometer onboard the X-ray astronomy satellite ASTRO-H. The detector array is cooled down to 50 mK using a 3-stage adiabatic demagnetization refrigerator (ADR). The cooling chain from room temperature to the ADR heat-sink is composed of superfluid liquid He, a 4He Joule-Thomson cryocooler, and 2-stage Stirling cryocoolers. It is designed to keep 30 L of liquid He for more than 3 years in the nominal case. It is also designed with redundant subsystems throughout from room temperature to the ADR heat-sink, to alleviate failure of a single cryocooler or loss of liquid He. © 2010 SPIE.

In recent years, X-ray telescopes have been shrinking in both size and weight to reduce cost and volume on space flight missions. Current designs focus on the use of MEMS technologies to fabricate ultra-lightweight and high-resolution X-ray optics. In 2006, Ezoe et al. introduced micro-pore X-ray optics fabricated using anisotropic wet etching of silicon (110) wafers. These optics, though extremely lightweight (completed telescope weight 1 kg or less for an effective area of 1000 cm(2)), had limited angular resolution, as the reflecting surfaces were flat crystal planes. To achieve higher angular resolution, curved reflecting surfaces should be used. Both silicon dry etching and X-ray LIGA were used to create X-ray optics with curvilinear micro-pores; however, the resulting surface roughness of the curved micro-pore sidewalls did not meet X-ray reflection criteria of < 3 nm rms in a 5 mu m(2) area. This indicated the need for a precision polishing process. This paper describes the development of an ultra-precision polishing process employing an alternating magnetic field assisted finishing process to polish the micro-pore sidewalls to a mirror finish (< 3 nm rms). A processing principle is presented, and a polishing machine is fabricated to explore the feasibility of this polishing process as a possible method for processing MEMS X-ray optics to meet X-ray reflection specifications.

We have been developing ultra light-weight X-ray optics using MEMS (Micro Electro Mechanical Systems) technologies. We utilized crystal planes after anisotropic wet etching of silicon (110) wafers as X-ray mirrors and succeeded in X-ray reflection and imaging. Since we can etch tiny pores in thin wafers, this type of optics can be the lightest X-ray telescope. However, because the crystal planes are alinged in certain directions, we must approximate ideal optical surfaces with flat planes, which limits angular resolution of the optics on the order of arcmin. In order to overcome this issue, we propose novel X-ray optics based on a combination of five recently developed MEMS technologies, namely silicon dry etching, X-ray LIGA, silicon hydrogen anneal, magnetic fluid assisted polishing and hot plastic deformation of silicon. In this paper, we describe this new method and report on our development of X-ray mirrors fabricated by these technologies and X-ray reflection experiments of two types of MEMS X-ray mirrors made of silicon and nickel. For the first time, X-ray reflections on these mirrors were detected in the angular response measurements. Compared to model calculations, surface roughness of the silicon and nickel mirrors were estimated to be 5 nm and 3 nm, respectively.

To understand the so-called excess noise, we measured the complex impedance of a TES microcalorimeter, and derived the hermal sensitivity alpha, current sensitivity beta, and heat capacity C. Making use of the obtained parameters, we found that the excess noise can be represented by two types of extra noise having similar spectra as Johnson and phonon noise. The contribution of the Johnson-like, usually expressed by the M factor, depended on alpha as M similar or equal to 0 2 root alpha, which is consistent with the behavior of the excess noise studied in other groups. Pursuing the better energy resolution, we suppressed the dominant noise components by introducing a Si collimator to irradiate X-rays only to the Au absorber, increasing the ADC resolution, and improving the temperature stability. So far, the energy resolution has been improved from 4.8 eV to 2.8 eV (FWHM).

We performed complex impedance measurements with a Ti/Au-based gamma-ray TES calorimeter with a bulk Sn absorber. Excellent energy resolution of 38 4 +/- 0 9 eV at 60 keV was observed. The impedance of the calorimeter can be well explained by a two-body thermal model. We investigated the behavior of the parameters of the calorimeter during the superconducting-to-normal transition. We confirmed that C and G(a) are in good agreement with the predicted values. We performed a noise analysis and found several excess noise components, as well as internal thermal fluctuation noise (ITFN) term due to the thermal conductance between the Sn absorber and the Ti/Au TES. Dominanting the noise is an excess noise having a similar frequency dependence to the phonon noise and the ITFN noise.

A TES microcalorimeter array is a promising spectrometer with excellent energy resolution and a moderate imaging capability. To realize a large format array in space, multiplexing the TES signals at the low tempersture stage is mandatory. We are developing frequency division multiplexing (FDM) based on baseband feedback technique. In FDM, each TES is AC-biased with a different carrier frequency. Signals from several pixels are summed and then read out by one SQUID. The maximum number of multiplexed pixels are limited by the frequency band in which the SQUID can be operated in a flux-locked loop, which is 1 MHz with standard flux-locked loop circuit. In the baseband feedback, the signal ( 10 kHz band) from the TES is once demodulated. Then a reconstructed copy of the modulated signal with an appropriate phase is fed back to the SQUID input coil to maintain an approximately constant magnetic flux. This can be implemented even for large cable delays and automatically suppresses the carrier. We developed a prototype electronics for the baseband feedback based on an analog phase sensitive detector (PSD) and a multiplier. Combined with Seiko 80-SSA SQUID amp, open-loop gain of 8 has been obtained for 10 kHz baseband signal at 5 MHz carrier frequency, with a moderate noise contribution of 27 pA root Hz at input.

Arrays of transition edge sensor (TES) X-ray microcalorimeters can provide a high energy resolution and a large area necessary for future dark baryon search missions such as DIOS (Diffuse Intergalactic Oxygen Surveyor). In the current design, the energy resolution of 2 eV at 0.3-1.5 keV and the geometrical area of 1 cm(2) are required for DIOS. As an R&D study, we fabricated a 16x16 Ti/Au bilayer TES array without an absorber, and achieved the energy resolution of 4.4 +/- 0.2 eV at 5.9 keV. Considering the recent experimental results on so-called excess noise, we investigated a detailed design of the TES array for DIOS. We concluded that we need a at least 20x20 pixel array consisting of 250 mu m-square TESs and 500 gm-square mushroom-type Bi/Au absorbers. We discussed technical issues to manufacture such a large format array.

The X-ray Imaging Spectrometer (XIS) onboard Suzaku has an energy resolution sufficient to detect O emission lines from the hot plasma of T &gt 106 K. Suzaku observations will produce new understaning of the physical condition of the hot phase of the Universe. New trials to quantitatively evaluate the Solar Wind Charge Exchange (SWCX) emission in the geocorona and the heliospheric region, the "M band problem" of the soft X-ray diffuse emission and the abundance pattern in the halo gas around galaxies are presented. © 2009 American Institute of Physics.

A high-energy-resolution energy dispersive spectrometer (EDS) utilizing a TES (transition edge sensor) microcalorimeter array is developed for a transmission electron microscope (TEM). The goals of the development are (1) an energy range of 0.3 - 10 keV, (2) an energy resolution of FWHM &lt 10 eV, (3) a maximum counting rate of 3 kcps, and (4) a cryogen-free cooling system. We adopted a dilution refrigerator (DR) pre-cooled by a Gifford-McMahon (GM) refrigerator to cool the TES microcalorimeter to -∼ 100 mK. In order to avoid micro phonics of GM fridge to propagate to the TEM, pressurized He gas is circulated between the DR and the GM to reject heat from the DR. The GM is mechanically well isolated from the TEM. In oder to obtain 3 kcps counting rate, we utilize a ten pixel TES array and read out the signals in parallel wtih ten analog signal channels from cryogenic to room temperature electronics. One of the pixels can be always irradiated by a radio isotope for energy calibration. As the first step, we have attached a single pixel TES system cooled by the cryogen-free cooling system to the TEM and obtained an energy resolution of 8 eV at 1.8 keV without degrading the spatial resolution of the TEM at a 2 Å level. A ten pixel TES system is also being developed from the front-end detector assembly to the room temperature digital electronics. We describe the signal processing system and packaging of the detector assembly. © 2009 American Institute of Physics.