CVClient

Naoki Hayase

(早勢直紀)

Profile Information

Affiliation: Assistant Professor,, Laboratory of Advanced Science and Technology for Industry, University of Hyogo

Researcher number: 81021631
J-GLOBAL ID: 202501016447057391
researchmap Member ID: R000087817

Research Interests

2

Research History

3

Apr, 2025 - Present

Laboratory of Advanced Science and Technology for Industry, University of Hyogo
Nov, 2023 - Mar, 2025

National Institute of Information and Communications Technology
Oct, 2020 - Oct, 2023

技術開発部, HOYA株式会社

Papers

1

Beyond EUV binary and phase shift masks simulation

Naoki Hayase, Tetsuo Harada

Proc. SPIE, Aug, 2024

Presentations

5

Background level theory for EUV multilayer deposition

Naoki Hayase, Tetsuo Harada

Photomask Japan 2025, Apr, 2025
Concept of EUV pulse width modulation

Naoki Hayase

The 21st IEEE TOWERS, Oct, 2024
Consolidated design approach to EUV mask blanks with TaBN based absorber

Takahiro Onoue, Naoki Hayase, Kazutake Taniguchi, Hitoshi Maeda, Teiichiro Umezawa

Photomask Technology 2023, Nov, 2023
Simulation study of Beyond-EUV mirrors for 6.7nm wavelength

Naoki Hayase

The 20th IEEE TOWERS, Oct, 2023
Feasibility study of alternative multilayer for EUV mask

Teiichiro Umezawa, Yohei Ikebe, Naoki Hayase, Takahiro Onoue

Photomask Technology 2022, Nov, 2022

Professional Memberships

2

2024 - Present

Optica
2024 - Present

SPIE

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