Michihiro Yamada, Shota Suzuki, Ai I. Osaka, Kazuaki Sumi, Takahiro Inoue, Azusa N. Hattori, Shinya Yamada, Kentarou Sawano, Marwan Dhamrin, Kohei Hamaya
Materials Science in Semiconductor Processing 174 2024年5月 査読有り
For high-performance spintronic applications with Co-based Heusler alloys, we explore Si1−xGex(111) grown by liquid phase epitaxy (LPE) with Al–Ge mixed paste, where x is the Ge content. By annealing the screen printed Al–Ge paste on a Si(111) substrate, a continuous Si1−xGex(111) layer with a smooth interface between the Si1−xGex layer and Si substrate is epitaxially grown. The surface with residual paste is polished and treated by chemical mechanical polishing and a catalyst referred etching (CARE) process, resulting in a reduction of the root-mean-square roughness to 0.52 nm over a large-scale area. After the surface treatments of the LPE-Si1−xGex, we can obtain Si0.93Ge0.07(111) to epitaxially grow one of the Co-based Heusler alloys, Co2FeSi. The magnetic properties and intermixing at the Co2FeSi/LPE-Si0.93Ge0.07(111) interface are consistent with those at the Co2FeAl0.5Si0.5/Si(111) and the Co2FeAl0.5Si0.5/Ge(111) interfaces. The Al–Ge-paste-induced LPE-Si1−xGex(111) and the CARE process for the surface are quite effective for the growth of Co-based Heusler alloys in future SiGe-based spintronic devices.