研究者業績

Shozo Inoue

  (井上 尚三)

Profile Information

Affiliation
Graduate Schoolof Engineering, University of Hyogo
Degree
(BLANK)(Osaka University)

J-GLOBAL ID
200901074234127570
researchmap Member ID
1000057685

Research Interests

 2

Research History

 6

Education

 3

Papers

 194

Misc.

 76
  • 永井晋平, 村上大志, 多田あずみ, 井上尚三
    2024年度精密工学会春季大会学術講演会講演論文集, 672-673, Mar, 2024  Last author
  • 岡田響, 森川直人, 部家彰, 井上尚三
    2023年度精密工学会秋季大会学術講演会講演論文集, 668-669, Sep, 2023  Last author
  • 井上達裕, 朝田昂大, 井上尚三
    2023年度精密工学会秋季大会学術講演会講演論文集, 664-665, Sep, 2023  Last author
  • FUJII Tatsuya, INA Ginnosuke, INOUE Shozo, NAMAZU Takahiro
    2015 "OS1420-430-1"-"OS1420-430-2", Nov 21, 2015  
    This paper reports on two types of fabrication methods for Si nanowires (NWs) using focused ion beam (FIB), photolithography, TMAH anisotropic wet-etching, and sacrificial oxidation. Type A specimens made from silicon-on-nothing (SON) membranes are produced by FIB system's probe manipulation and film deposition functions. The mean Young's modulus of FIB-fabricated NWs evaluated by tensile testing in SEM using electrostatic actuated MEMS device is 129 GPa. After vacuum annealing, the Young's modulus is increased to 168 GPa. Type B specimens are produced by wire-thinning technique using sacrificial oxidation and oxide film removal. We succeeded in making freestanding bridge Si NW with the width of 76 nm.
  • KOZEKI Takahiro, FUJII Tatsuya, INOUE Shozo, NAMAZU Takahiro
    2015 "OS1419-420-1"-"OS1419-420-2", Nov 21, 2015  
    Focused ion beam (FIB) is one of strong nanofabrication tools for Si and its related devices. In this study, To produce ultra-fine Si nanowires less than 50nm, we propose a new nanostructure fabrication technique using FIB and anisotropic etching. Si nanowires of several tens of nm could be formed, and it was found that the nanowires consisted of Ga ion doped amorphous Si. Uniaxial tensile test of the nanowires was performed to directly measure the Young's modulus and fracture strength.

Teaching Experience

 3

Research Projects

 15