Seiji Nakashima, Yosuke Tsujita, Syota Seto, Hironori Fujisawa, Hiroshi Nishioka, Masafumi Kobune, Masaru Shimizu, JungMin Park, Takeshi Kanashima, Masanori Okuyama
2011 International Symposium on Applications of Ferroelectrics and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, ISAF/PFM 2011, Oct 5, 2011
350-nm-thick BiFeO3(BFO) thin films have been deposited by dual ion beam sputtering on SrRuO3-buffered SrTiO3(001) substrates of 0° and 0.5° off-cut along [100] at various Bi2O3-side/Fe2O3-side beam current ratio. The BFO thin film on 0.5° off-cut STO substrate deposited at beam current ratio of 20 mA/30 mA show fully saturated D-E hysteresis loops at room temperature. The remanent polarization (2Pr) was 132 μC/cm2. Stripe domain structure was also observed in IP piezoelectric response image. It is considered that the improvement of leakage of BFO on 0.5° off-cut STO substrate is due to reduction of 109° domain walls. © 2011 IEEE.