Curriculum Vitaes

Hironori Fujisawa

  (藤沢 浩訓)

Profile Information

Affiliation
Associate Professor, Graduate School, of Engineering, Department of Electrical Engineering and Computer Sciences, University of Hyogo
Degree
Doctor of engineering(Kyoto University)

J-GLOBAL ID
200901024163919928
researchmap Member ID
1000214812

External link

Papers

 171
  • Seiji Nakashima, Koji Kimura, Naohisa Happo, Artoni Kevin R. Ang, Yuta Yamamoto, Halubai Sekhar, Ai I. Osaka, Koichi Hayashi, Hironori Fujisawa
    Scientific Reports, 14(1), Dec, 2024  
    A intermediate multidomain state and large crystallographic tilting of 1.78° for the (hh0)pc planes of a (001)pc-oriented single-domain Mn-doped BiFeO3 (BFMO) thin film were found when an electric field was applied along the [110]pc direction. The anomalous crystallographic tilting was caused by ferroelastic domain switching of the 109° domain switching. In addition, ferroelastic domain switching occurred via an intermediate multidomain state. To investigate these switching dynamics under an electric field, we used in situ fluorescent X-ray induced Kossel line pattern measurements with synchrotron radiation. In addition, in situ inverse X-ray fluorescence holography (XFH) experiments revealed that atomic displacement occurred under an applied electric field. We attributed the atomic displacement to crystallographic tilting induced by a converse piezoelectric effect. Our findings provide important insights for the design of piezoelectric and ferroelectric materials and devices.
  • Takeshi Asuka, Junpei Ouchi, Hironori Fujisawa, Seiji Nakashima
    Japanese Journal of Applied Physics, 62(SM), Nov 1, 2023  Peer-reviewedCorresponding author
    HfO2-based ferroelectric materials do not necessarily require high-temperature annealing for crystallization, making them attractive for applications in transparent electronic devices on plastic or glass substrate. In this study, (Hf, Zr)O2 (HZO) films prepared via non-heating sputtering are investigated and their application to ferroelectric-gate thin-film transistors (TFTs) is demonstrated. The internal tensile stress induced by (In, Sn)O x (ITO) top-electrode deposition is found to promote the crystallization of HZO from the amorphous state to the ferroelectric phase. ITO/HZO (15-25 nm)/ITO capacitors prepared via the non-heating process exhibit ferroelectric hysteresis loops with remanent polarizations of 6-9 μC cm-2 and coercive fields of 0.6-1.1 MV cm-1. Ferroelectric-gate TFTs with a 10 nm thick ITO channel are also fabricated via the non-heating process. These TFTs show nonvolatile operation with an on/off ratio of ∼10. These findings demonstrate the potential of HZO for transparent devices on substrates with low thermal resistance prepared via the non-heating process.
  • Kazuki Arima, Seiji Nakashima, Koji Kimura, Koichi Hayashi, Naohisa Happo, Hironori Fujisawa
    Japanese Journal of Applied Physics, 62(SM), Nov 1, 2023  Peer-reviewed
    Bismuth ferrite (BiFeO3: BFO) is a multiferroic material that exhibits ferroelectricity, antiferromagnetism, and ferroelasticity simultaneously at RT. BFO holds great promise as a ferroelectric semiconductor because of its ability to alter conductivity by reversing its spontaneous polarization. Moreover, BFO thin films doped with transition metals such as Mn or V can modulate their conductivity. Nevertheless, the mechanism of this conductivity change remains unclear because the effects of dopants on the local atomic structure of BFO are not fully understood. In this study, we investigated the local atomic structure around the Fe site in a V-doped BFO thin film by X-ray fluorescence holography. Reconstructed atomic structures from the Fe Kα hologram patterns revealed that the atomic structure stability of the V-doped BFO thin film differs from that of previously reported Mn-doped BFO thin films. The results provide important insights into the mechanism of controlling the conductivity of BFO thin films by dopants.
  • Seiji Nakashima, Tatsuya Ito, Takuo Ohkochi, Hironori Fujisawa
    Japanese Journal of Applied Physics, 61, Nov 1, 2022  Peer-reviewed
    Recently, ferroelectric semiconductors has become a subject of interest with regard to potential applications in novel electronic and opto-electric devices. One of the most important aspects of employing these materials is band modulation based on spontaneous polarization to generate polarization charges acting as quasi-dopants at metal/ferroelectric and ferroelectric/ferroelectric interfaces. The present study fabricated graphene/Mn-doped BiFeO3 (BFMO)/SrRuO3/SrTiO3(001) capacitor structures with the BFMO having either upward or downward polarization. Band modulation at the graphene/BFMO interface as a result of polarization charges was evaluated using photoemission electron microscopy on the BL17SU beamline at the SPring-8 facility, Japan. The chemical shifts observed in Bi 4f and C 1s XPS spectra indicated that positive (negative) polarization charges acted as quasi-dopants for electron (hole) doping of the BFMO and graphene.
  • Hironori Fujisawa, Kazuma Ikeda, Seiji Nakashima
    Japanese Journal of Applied Physics, 60(SF), Nov, 2021  Peer-reviewedLead author
    Ferroelectric gate-all-around (GAA) transistors with a nanowire (NW) channel standing vertically on the substrate would be a potential breakthrough to overcome limitations in the high-integration of ferroelectric memories. In the present study, we fabricated vertical ferroelectric GAA NW transistors (VFGAANWTs) with ZnO NWs (average diameters: 53-193 nm) as the channel, (Hf,Zr)O2 film (average thicknesses: 9.3-58 nm) as the gate ferroelectric, and Ti as the gate electrode. The channel length was 100-300 nm. The VFGAANWTs showed n-channel operation with on/off ratios of ∼10, and their on/off states were retained for at least 2 min by the ferroelectric polarization of (Hf,Zr)O2 after the gate bias was removed, demonstrating the nonvolatile electric field effect in the VFGAANWTs. The results confirm the strong potential of the VFGAANWTs in high-density ferroelectric memory applications.

Misc.

 16
  • Reports of Toyoda Physical and Chemical Research Institute., 63(63) 135-139, 2010  
  • FUJISAWA Hironori, NAKASHIMA Seiji, SHIMIZU Masaru, NIU Hirohiko
    IEICE technical report. Electron devices, 98(591) 13-20, Feb 16, 2009  
    The grain size of MOCVD-Pb(Zr,Ti)O_3(PZT) thin films was successfully controlled by changing the grain size of Ir bottom electrodes and by changing the growth rate of PZT films. In Ir/PZT/Ir capacitors, the grain size of PZT thin films increased from 120 to 240nm as the grain size of bottom Ir electrodes increased from 50 to 200nm. The dielectric constants of PZT thin films increased from 760 to 1440 as the grain size increased from 120 to 240nm. Remanent polarization increased and coercive field decreased as the grain size increased. This dependence of electrical properties on the grain size coincided with that of ceramics.
  • FUJISAWA Hironori, SHIMIZU Masaru
    2007(9) 1-6, Jul 10, 2007  
  • SHIMIZU Masaru, NONOMURA Hajime, FUJISAWA Hironori, NIU Hirohiko, HONDA Koichiro
    Technical report of IEICE. SDM, 104(713) 23-27, Mar 4, 2005  
    PbTiO_3 self-assembled nanostructures were successfully fabricated on Pt/SiO_2/Si(100) and Pt/SrTiO_3(111), (101) and (001) substrates. PbTiO_3 showed the Volmer-Weber growth mode and in the initial growth stages nanoislands (nanostructures) were formed on these substrates. Nanostructures were randomly distributed on Pt/SiO_2/Si. On Pt/SrTiO_3, three types of nanostructures were obtained and were arranged laterally. They had a perovskite structure. Using piezoresponse force microscopy (PFM), nanostructures were found to be ferroelectric..
  • NONOMURA Hajime, FUJISAWA Hironori, SHIMIZU Masaru, NIU Hirohiko, HONODA Koichiro
    Technical report of IEICE. SDM, 103(729) 31-36, Mar 10, 2004  
    Self-assembled PbTiO_3 islands were prepared on Pt/SrTiO_3 and MgO (111), (110), (100) substrates by MOCVD. PbTiO_3 islands with a triangular shape on (111) substrates, a triangular-prism-shape on (110) substrates and a square shape on (100) substrates were observed. These PbTiO_3 islands also had uniform in-plane orientation. These results showed that the structure of self-assembled PbTiO_3 islands, such as shape and direction, were controllable using the epitaxial relation. From piezoresponse measurements, it was found that these nano-sized PbTiO_3 islands exhibited ferroelectricity.
  • OKANIWA Mamoru, FUJISAWA Hironori, SHIMIZU Masaru, NIU Hirohiko
    Technical report of IEICE. OME, 103(170) 1-6, Jul 4, 2003  
    Low temperature growth of Pb(Zr,Ti)O_3 (PZT) thin films by MOCVD was performed using PbTiO_3 (PTO) seeds . When (C_2H_5)_3PbOCH_2C(CH_3)_3(TEPOL) was used as a lead-precursor, perovskite PZT thin films were grown at 380℃. Furthermore, PTO seeds were used in combination with TEPOL, perovskite PZT thin films were grown at the temperature as low as 340℃. PZT thin films grown at 370℃ exhibited D-E loops with 2Pr of 4.2 μC/cm^2 and 2Ec of 63kV/cm. It was also found that crystallinity of PZT thin films was strongly influenced by that of PTO seeds.
  • NONOMURA Hajime, FUJISAWA Hironori, SHIMIZU Masaru, NIU Hirohiko, HONODA Koichiro
    Technical report of IEICE. SDM, 102(732) 69-74, Mar 11, 2003  
    We examined the influences of the surface flatness of a substrate on the epitaxial growth and electrical properties of Pb(Zr,Ti)O_3(PZT) ultrathin films grown on SrRuO_3(SRO)/SrTiO_3(STO) by Metalorganic Chemical Vapor Deposition (MOCVD). When SRO was deposited on the treated STO with an atomically flat surface, SRO showed flat terraces and steps. On the other hand, SRO deposited on the nontreated STO showed no terraces and steps. The 20-nm-thick PZT ultrathin film on SRO/treated STO showed well saturated hysteresis loops, although PZT on SRO/nontreated STO showed no saturated hysteresis loops due to high leakage current.
  • OKANIWA Mamoru, FUJISAWA Hironori, SHIMIZU Masaru, NIU Hirohiko
    Technical report of IEICE. SDM, 101(718) 13-18, Mar 7, 2002  
    Perovskite PZT thin films were successfully obtained on Pt/SiO_2/Si substrate at 395℃ by two step metalorganic chemical vapor deposition (MOCVD) using seeds. In our MOCVD, prior to the growth of PZT films, PTO or PZT was deposited as a seed. PZT thin films with seeds deposited for 10-20s showed better crystallinity and ferroelectric properties than those PZT films without seeds. Seeded PZT films showed 2Pr of 13-17 μC/cm^2. When deposition times of seeds were longer than 40s, 2Pr decreased from 17 to 12 μC/cm^2.
  • Proc. of 13th IEEE Int. Symp. on Applications of Ferroelectrics 2002, 87-90, 2002  
  • FUJISAWA Hironori, MURATA Shuhei, MATSUOKA Hiromasu, BANDOU Tatsuya, SHIMIZU Masaru, NIU Hirohiko
    Technical report of IEICE. SDM, 100(652) 33-37, Mar 5, 2001  
    Metal-insulator-semiconductor (MIS) and metal-ferroelectrics-insulator-semiconductor (MFIS) structures were fabricated using sputtered-MgO thin films as an insulative layer and their electrical properties were investigated. Capacitance-voltage (C-V) characteristics of MIS structure did not show a hysteresis. Interface trap densities of the MIS structure measured using the deep level transient spectroscopy (DLTS) method was approximately 10^<12>eV^<-1>. Crystalline Pb(Zr,Ti)O_3 (PZT) thin films were successfully grown on MgO/Si(100) by metalorganic chemical vapor deposition (MOCVD). Memory windows of 0.2-0.7V due to ferroelectricity of PZT thin films were observed for the MFIS structures.
  • FUJISAWA Hironori, SHIMIZU Masaru, NIU Hirohiko
    IEICE technical report. Electron devices, 99(670) 7-11, Mar 8, 2000  
    MgO, Al_2O_3 and TiO_2 thin films were used as insulative buffer layers in the metal-ferroelectrics-insulator-semiconductor(MFIS)structure. Perovskite polycrystalline Pb(Zr, Ti)O_3(PZT)thin films were grown on Si(100)using these buffer layers. Field effects was observed in capacitance-voltage(C-V)characteristics of MIS diodes. However, hysteresis due to ferroelectricity of PZT films was not obtained for MFIS diodes. Interface trap densities of Au / PZT / Si and Au / PZT / Al_2O_3 / Si diodes measured using the deep level transient spectroscopy(DLTS)method were 2×10^<12> and 2×10^<11>-1×10^<12>cm^<-2>eV^<-1>, respectively.
  • Proc. of 12th IEEE Int. Symp. on Applications of Ferroelectrics, 619-622, 2000  
  • Proc. of 12th IEEE Int. Symp. on Applications of Ferroelectrics, 961-964, 2000  
  • 藤沢 浩訓, 中嶋 誠二, 清水 勝, 丹生 博彦
    電子情報通信学会技術研究報告書 (信学技術), 98 13, 1998  
  • Proceedings of the 3rd International Symposium on Sputtering & Plasma Processes, 93, 1995  
  • Proceedings of 2nd International Conference on Thin Film Physics and Applications, 478, 1994  

Books and Other Publications

 2

Presentations

 110

Research Projects

 28