Curriculum Vitaes
Profile Information
- Affiliation
- Associate Professor(Himeji Institute of Technology), Laboratory of Advanced Science and Technology for Industry, University of Hyogo(Concurrent)教授, 大学院 工学研究科
- Degree
- (BLANK)(The University of Tokyo)
- J-GLOBAL ID
- 200901026854817474
- researchmap Member ID
- 1000296310
Research Interests
4Research Areas
2Research History
3-
1999 - 2004
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1987 - 1999
Education
2Papers
216-
Japanese Journal of Applied Physics, 64(5) 05SP14-05SP14, May 1, 2025 Peer-reviewedLast authorAbstract X-ray lithography was performed using synchrotron radiation to fabricate a nozzle array filter with submicron-order aperture diameters for a mesh nebulizer, as generating mist with a high yield of submicron-sized droplets is essential for delivering medication deep into the lungs. Utilizing polymethylmethacrylate as the resist material, precise control of X-ray exposure with distribution was performed to achieve submicron-order aperture fabrication, using a two-axis lead zirconate titanate stage with nanometer-scale positioning resolution. By precisely controlling the exposure process and development time on a minute scale, we successfully fabricated a nozzle array with submicron-order aperture diameters.
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Diamond and Related Materials, 154 112136-112136, Apr, 2025 Peer-reviewedLead authorCorresponding author
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陽電子科学, (24) 9-18, Mar, 2025 Peer-reviewedInvitedLead authorCorresponding author
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Journal of Applied Physics, 136(045301) 045301, Jul, 2024 Peer-reviewed
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Journal of Photopolymer Science and Technology, 37(4) 415-422, Jun 25, 2024 Peer-reviewed
Misc.
95-
LASTI Annual Report, 25 53, Oct, 2024
Books and Other Publications
4Presentations
60-
The 10th International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies(EM-NANO2025)
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18th International Conference on New Diamond and Nano Carbon(NDNC2025)
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Workshop on Diamond-like carbon and related films, May 10, 2025 Invited
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電気情報通信学会・シリコン材料・デバイス研究会（SDM）/有機エレクトロニクス研究会（OME）
Research Projects
15-
科学研究費助成事業 基盤研究(C), 日本学術振興会, Apr, 2023 - Mar, 2026
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Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (C), Japan Society for the Promotion of Science, Apr, 2022 - Mar, 2025
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Grants-in-Aid for Scientific Research Grant-in-Aid for Challenging Research (Exploratory), Japan Society for the Promotion of Science, Jun, 2022 - Mar, 2024
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研究助成金, 公益財団法人 増屋記念基礎研究振興財団, Apr, 2022 - Mar, 2023
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Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B), Japan Society for the Promotion of Science, Apr, 2017 - Mar, 2020
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Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (C), Japan Society for the Promotion of Science, Apr, 2017 - Mar, 2020
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Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, Apr, 2013 - Mar, 2018
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Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, Apr, 2012 - Mar, 2015
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Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, Apr, 2012 - Mar, 2015
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Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, Apr, 2011 - Mar, 2014
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Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 2010 - 2012
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Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 2008 - 2012
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Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 2008 - 2010
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Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 2007 - 2009
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Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 2002 - 2004