Masafumi Kobune, Takuya Nishimine, Takuya Matsunaga, Satoshi Fujita, Takeyuki Kikuchi, Hironori Fujisawa, Masaru Shimizu, Kensuke Kanda, Kazusuke Maenaka
JAPANESE JOURNAL OF APPLIED PHYSICS, 56(10), Oct, 2017
Regardless of the deposition time (30-90 min), almost single-phase magnetite (Fe3O4) films with a cubic inverse-spinel structure were produced at a substrate temperature of 500 degrees C by metalorganic chemical vapor deposition (MOCVD). The Fe3O4/(Bi(3.25)Nd(0.65)Eu(0.1)0) Ti3O12 (BNEuT) composite film deposited at 500 degrees C for 90 min by MOCVD exhibited excellent room-temperature magnetic properties, such as a saturation magnetization of 480 emu/cm(3), a residual magnetization of 160 emu/cm(3), and a coercivity of 297 Oe. Ferromagnetic Fe3O4 electrodes micropatterned using a combination of photolithography and reactive ion etching were fabricated after MOCVD, and their structural, leakage current, and ferroelectric characteristics were investigated. The room-temperature leakage current density-applied electric field and polarization-electric field (P-E) characteristics of the composite films were successfully measured using Fe3O4 electrodes. The room-temperature P-E hysteresis loop for a sample with the structure Fe3O4/BNEuT/Nb: TiO2/Ti had a relatively good shape, with a remanent polarization of 8 mu C/cm(2) and a coercive field of 193 kV/cm. (C) 2017 The Japan Society of Applied Physics